65 nm feature sizes using visible wavelength 3-D multiphoton lithography

Haske, Wojciech; Chen, Vincent W.; Hales, Joel M.; Dong, Wenting; Barlow, Stephen; Marder, Seth R.; Perry, Joseph W.

doi:10.1364/oe.15.003426

Cited by 287 publications

(207 citation statements)

References 19 publications

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“…1,2 Femtosecond lasers are frequently used to create 3D patterns in polymers and glasses. [3][4][5][6][7] However, 3D metal direct-writing remains a challenge. Here, we describe a method to fabricate silver nanostructures embedded inside a polymer matrix using a femtosecond laser centered at 800 nm.…”

Section: Introductionmentioning

confidence: 99%

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Vora

Kang

Mazur

2012

JoVE

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The standard nanofabrication toolkit includes techniques primarily aimed at creating 2D patterns in dielectric media. Creating metal patterns on a submicron scale requires a combination of nanofabrication tools and several material processing steps. For example, steps to create planar metal structures using ultraviolet photolithography and electron-beam lithography can include sample exposure, sample development, metal deposition, and metal liftoff. To create 3D metal structures, the sequence is repeated multiple times. The complexity and difficulty of stacking and aligning multiple layers limits practical implementations of 3D metal structuring using standard nanofabrication tools. Femtosecond-laser direct-writing has emerged as a pre-eminent technique for 3D nanofabrication. 1,2 Femtosecond lasers are frequently used to create 3D patterns in polymers and glasses. [3][4][5][6][7] However, 3D metal direct-writing remains a challenge. Here, we describe a method to fabricate silver nanostructures embedded inside a polymer matrix using a femtosecond laser centered at 800 nm. The method enables the fabrication of patterns not feasible using other techniques, such as 3D arrays of disconnected silver voxels. 8 Disconnected 3D metal patterns are useful for metamaterials where unit cells are not in contact with each other, 9 such as coupled metal dot 10,11 or coupled metal rod 12,13 resonators. Potential applications include negative index metamaterials, invisibility cloaks, and perfect lenses.In femtosecond-laser direct-writing, the laser wavelength is chosen such that photons are not linearly absorbed in the target medium. When the laser pulse duration is compressed to the femtosecond time scale and the radiation is tightly focused inside the target, the extremely high intensity induces nonlinear absorption. Multiple photons are absorbed simultaneously to cause electronic transitions that lead to material modification within the focused region. Using this approach, one can form structures in the bulk of a material rather than on its surface.Most work on 3D direct metal writing has focused on creating self-supported metal structures. 14-16 The method described here yields submicrometer silver structures that do not need to be self-supported because they are embedded inside a matrix. A doped polymer matrix is prepared using a mixture of silver nitrate (AgNO 3 ), polyvinylpyrrolidone (PVP) and water (H 2 O). Samples are then patterned by irradiation with an 11-MHz femtosecond laser producing 50-fs pulses. During irradiation, photoreduction of silver ions is induced through nonlinear absorption, creating an aggregate of silver nanoparticles in the focal region. Using this approach we create silver patterns embedded in a doped PVP matrix. Adding 3D translation of the sample extends the patterning to three dimensions. Video LinkThe video component of this article can be found at

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Section: Introductionmentioning

confidence: 99%

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Vora

Kang

Mazur

2012

JoVE

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“…This femtosecond laser processing technology has drawn a great interest over the last decade because of the following reasons: (i) it can fabricate any kind of 3D structures out of photopolymer based on computer generated 3D model; (ii) the fabrication procedure is rapid and flexible; (iii) the spatial resolution of the structures can be as small as 100 nm; (iv) the fabrication process allows formation of structures directly integrating them into more complex functional micro-devices. There has been a considerable amount of research done by many authors during the last decade revealing the physics of this fabrication technology [1][2][3][4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

“…Recently, a number of this type 3D fabrication experiments were successfully accomplished by applying Ti:sapphire femtosecond lasers generating 800 nm central wavelength light and using commercially available materials such as epoxy based SU-8 photoresins, hybrid organic-inorganic ORMOCER materials, and various blends of acrylates [4][5][6][7][8]. LTPP as a fabrication technology could be applicable in areas of micro-optics, photonics, micro-fluidics, micro-optoelectromechanical systems (MOEMS), tissue engineering, etc.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond visible light induced two-photon photopolymerization for 3D micro/nanostructuring in photoresists and photopolymers

Malinauskas¹,

Purlys²,

Rutkauskas³

et al. 2010

Lithuanian J. Phys.

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Laser two-photon polymerization (LTPP) has been widely reported as a tool for three-dimensional micro/nanofabrication. Femtosecond lasers are employed to form nanostructures in photosensitive resins with subwavelength resolution. We demonstrate high throughput large scanning area LTPP system based on linear motor driven stages combined with Yb:KGW high repetition rate (312.5 kHz) amplified laser as irradiation source (515 nm second harmonic's wavelength). Femtosecond green light can be focused to a smaller diffraction limited spot and provides higher structuring resolution comparing to commonly used Ti:sapphire lasers (operating at NIR wavelengths) used for LTPP. Additionally, shorter irradiation wavelength enables to process more of widely used photosensitive materials. The system capacitates production of nanostructures having 200 nm lateral resolution with high repeatability. By modifying focusing optics there is a possibility to scale up the fabrication: reduction of resolution results in shortening of fabrication time. The system enables formation of 3D structures with size varying from tens of microns to tens of millimetres. Most of the materials commonly used for photopolymerization technology (various blends of acrylates, hybrid organic-inorganic materials, and epoxy resins) are well suitable for processing with the constructed LTPP system.

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“…So far, the 2PP process was primarily optimized for better process resolution, which is widely studied and reported. [16][17][18][19][20] At the same time, large-scale 2PP structuring to build structures with centimeter sizes and submicron resolution is required for many applications. However, in the conventional 2PP process, the structure height is limited by the working distance of the microscope objective used for focusing laser pulses into the photosensitive material.…”

Section: Introductionmentioning

confidence: 99%

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

et al. 2013

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We developed a novel two-photon polymerization (2PP) configuration for fabrication of high-aspect three-dimensional (3D) structures, with an overall height larger than working distance of the microscope objective used for laser beam focusing into a photosensitive material. This method is based on a modified optical 2PP setup, where a microscope objective (1003 high N.A.), immersion oil and cover glass can be moved together into the photosensitive material, resulting in an effective higher and wider objective working range (WOW-2PP). The proposed technique enables the fabrication of high-aspect structures with sub-micrometer process resolution. 3D structures with a height of 7 mm are demonstrated, which could hardly be built with the conventional 2PP set-up due to refractive index mismatch and laser beam disturbances.

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65 nm feature sizes using visible wavelength 3-D multiphoton lithography

Cited by 287 publications

References 19 publications

A Method to Fabricate Disconnected Silver Nanostructures in 3D

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Femtosecond visible light induced two-photon photopolymerization for 3D micro/nanostructuring in photoresists and photopolymers

High-aspect 3D two-photon polymerization structuring with widened objective working range (WOW-2PP)

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