Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.
DOI: 10.1109/freq.2004.1418481
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622MHz high frequency fundamental composite crystal resonator with an air-gapped electrode

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Cited by 10 publications
(7 citation statements)
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“…This technique allows manufacturing very thin quartz crystals resonators but need lot of effort to manufacture and processing, therefore not economically viable solutions to date. Umeki et.al [38] proposed 622 MHz double inverted Mesa air-gapped resonator in which blank mounting and electrode are connected by metal alloy and wire using direct bonding technology (Fig. 2).…”
Section: A High Frequency Quartz Crystal Resonatormentioning
confidence: 99%
See 1 more Smart Citation
“…This technique allows manufacturing very thin quartz crystals resonators but need lot of effort to manufacture and processing, therefore not economically viable solutions to date. Umeki et.al [38] proposed 622 MHz double inverted Mesa air-gapped resonator in which blank mounting and electrode are connected by metal alloy and wire using direct bonding technology (Fig. 2).…”
Section: A High Frequency Quartz Crystal Resonatormentioning
confidence: 99%
“…Reducing the wafer thickness beyond certain limit makes fragile resonators. And, quartz wafer have reached their technological limit in terms of the operating frequency under the constraints of cost and reliability [37], [38].…”
Section: A High Frequency Quartz Crystal Resonatormentioning
confidence: 99%
“…In device applications, unattached electrodes at some distance from the plate surfaces have been occasionally used [19][20][21]. Unattached or separated electrodes offer new design parameters and certain advantages over electrodes deposited on the plate surfaces.…”
Section: Introductionmentioning
confidence: 99%
“…In most cases, the electrodes are directly deposited on the surface of the piezoelectric structure. Unattached electrodes at some distance from the surface have been occasionally used in piezoelectric devices [5][6][7] . There are limited theoretical results on devices with unattached electrodes.…”
mentioning
confidence: 99%