514 Mechanical reliability evaluation of silicon chips based on the flaws introduced in dicing process

Kamiya, Shoji; Inoue, Takiro; Jindo, Hiroaki

doi:10.1299/jsmetokai.2006.55.217

The Proceedings of Conference of Tokai Branch

2006

DOI: 10.1299/jsmetokai.2006.55.217

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514 Mechanical reliability evaluation of silicon chips based on the flaws introduced in dicing process

Shoji Kamiya¹,

Takiro Inoue²,

Hiroaki Jindo³

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514 Mechanical reliability evaluation of silicon chips based on the flaws introduced in dicing process

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