5 kHz high repetition rate and high power XeCl excimer laser

Abstract

A 5 kHz high repetition rate excimer laser has been developed. An average laser power of 0.56 kW at 5 kHz operation, which remains stable for 1 s, is obtained. This duty time is limited only by overheating of the switching thyratrons. The 5 kHz operation is attained by some improvements to the gas conditions, the UV-preionization scheme, and the gas flow speed in the discharge region. The gas is circulated at an effective flow velocity of 137 m/s by a newly developed two-stage axial blower. The gas conditions are optimized experimentally to achieve 5 kHz operation. To obtain uniform preionization, the locations of pin electrodes for the preionization are determined on the basis of numerical results. 0 1995 American Institute of Physics.

A single-filament schlieren method for flowing characteristic measurements in the pulsed gas lasers

“…High average power is achieved by increasing the repetition rate up to several kilohertz [2,6]. However, the operation of excimer laser at high repetition rate is limited by the discharge homogeneity and the gas circulation system.…”

<title>Optimization of initial parameters of XeCl laser pumping by changing of pulse duration using computer modeling</title>

“…Pulse duration ofabout 7 ns and output energy of28 mJ have been achieved in [3]. A possibility to operate at a high repetition rate of S kHz is shown in [4]. High specific output energy of 10.5 J/l is reported in [5].…”

“…A number of prototypes for commercial use [1][2][3][4][5] have been developed in the last decade. In Ref.…”

<title>Peculiarities of short pulse electrical discharge XeCl laser</title>

“…are being created. In the paper [6] it is announced on creation of a laser possessing average power of radiation of 0,56 kW at p.r.r. as 5 kHz.…”