4D-5 Lateral Field Excited High Frequency Bulk Acoustic Wave Sensors

McCann, Donald F.; Parks, J.M.; McGann, Jason M.; Cunha, M. Pereira da; Vetelino, J.F.

doi:10.1109/ultsym.2007.77

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2019

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“…This kind of electrode structure enables the electrical field to penetrate into the liquid. Therefore, LFE-QCM has extremely high sensitivity to electrical properties in the liquid, and the mechanical properties similar to the TFE sensor [ 15 , 16 , 17 , 18 ]. At present, many studies have been completed on LFE-QCM, which has been shown to have many advantages over traditional QCM in practical applications.…”

Section: Introductionmentioning

confidence: 99%

Study on Dual Channel Lateral Field Excitation Quartz Crystal Microbalance for Measuring Liquid Electrical Properties

Liang

Kong

Liu

2019

Sensors

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Lateral field excitation quartz crystal microbalance (LFE-QCM) can detect both the electrical properties (conductivity and permittivity) and mechanical properties (viscosity and density) of the liquid. In practical applications for detecting electrical properties, the viscosity and density of the liquid will also change. This research proposed a dual-channel LFE-QCM for reducing the influence of density and viscosity. The sensing layer of one resonant element is almost bare, and the other is covered by a metal film as a reference. Different organic solutions and NaCl solution were used to study the influence of mechanical properties and the temperature on electrical properties. The experimental results demonstrate that the dual-channel LFE-QCM is necessary for properly detecting electrical properties of the liquid.

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