2015
DOI: 10.1002/sdtp.10261
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45.1: Invited Paper: Future Possibilities of Crystalline Oxide Semiconductor, Especially C‐Axis‐Aligned Crystalline IGZO

Abstract: Through detailed analyses, the structure of c-axis-aligned crystalline (CAAC) IGZO, which is a dense, stable crystal morphology, is found to differ from single-crystal and amorphous structures. We propose a model for determining its film deposition mechanism. CAAC-IGZO field-effect transistors find application in displays for use as human-machine interfaces.

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Cited by 17 publications
(8 citation statements)
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“…3(a)], OLEDs are deposited on a substrate provided with an OLED control circuit so that the OLEDs have a top-emission structure. Note that the FETs in the control circuit are fabricated from an oxide semiconductor [30][31][32][33][34][35]. In the next step [ Fig.…”
Section: • Sid 2018 Digestmentioning
confidence: 99%
“…3(a)], OLEDs are deposited on a substrate provided with an OLED control circuit so that the OLEDs have a top-emission structure. Note that the FETs in the control circuit are fabricated from an oxide semiconductor [30][31][32][33][34][35]. In the next step [ Fig.…”
Section: • Sid 2018 Digestmentioning
confidence: 99%
“…We have developed our own equipment to automate this separation process, making this technology suitable for mass production [7]. The FETs use c-axis-aligned crystalline indium gallium zinc oxide [8][9][10][11][12][13], and color display is achieved with a "white tandem OLED, top emission, and color filter" (WTC) structure [14][15][16]. Transparent electrodes with different thicknesses for different colors are provided on reflective electrodes, i.e., a microcavity structure is employed.…”
Section: Kawara-type Multidisplaymentioning
confidence: 99%
“…We discovered CAAC-IGZO and nanocrystalline IGZO (nc-IGZO), which have crystal morphologies different from those of single crystal and amorphous IGZOs [9][10][11][12]. Cornell University has also investigated CAAC-OS [13][14][15][16][17][18].…”
Section: Introductionmentioning
confidence: 99%