44‐2: Separation Process using Commercially Available Polyimide or Acrylic with Linear Laser

Abstract

The use of a buffer layer in a separation layer containing commercial polyimide or acrylic allows normal laser separation without using special laser irradiation, even if foreign particles (approximately 1 mmĭ) are attached to a glass substrate. A linear laser used for the crystallization of low-temperature polysilicon can be used. Author Keywordslinear laser; fabrication method of flexible devices; buffer layer; PI; acrylic; separation with organic compound.