4222 Development of a Micro Capacitive Ultrasonic Sensor Having Parylene Diaphragm

Aoyagi, Shigeaki; Ono, Daisuke; Furukawa, Katsuhide; Tanaka, Takashi; Inoue, Kouji; Yamashita, K.; Okuyama, Masanori

doi:10.1299/jsmemecjo.2007.7.0_347

The Proceedings of the JSME Annual Meeting

2007

DOI: 10.1299/jsmemecjo.2007.7.0_347

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4222 Development of a Micro Capacitive Ultrasonic Sensor Having Parylene Diaphragm

Shigeaki Aoyagi

Daisuke Ono

Katsuhide Furukawa

et al.

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4222 Development of a Micro Capacitive Ultrasonic Sensor Having Parylene Diaphragm

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