2009
DOI: 10.1364/oe.17.006252
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42 GHz pin Germanium photodetector integrated in a silicon-on-insulator waveguide

Abstract: A compact pin Ge photodetector is integrated in submicron SOI rib waveguide. The detector length is reduced down to 15 microm using butt coupling configuration which is sufficient to totally absorb light at the wavelength of 1.55 microm. A -3 dB bandwidth of 42 GHz has been measured at a 4V reverse bias with a responsivity as high as 1 A/W at the wavelength of 1.55 microm and a low dark current density of 60 mA/cm(2). At a wavelength of 1.52 microm, a responsivity of 1 A/W is obtained under -0.5 V bias. The pr… Show more

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Cited by 420 publications
(194 citation statements)
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“…5(b), have been realized [20]. The operation frequency more than 30 GHz has been reported for such integrated devices [34,35]. Ava- lanche photodiodes of Ge with a carrier multiplication layer of Si have been also fabricated for the highly sensitive photodetection [36].…”
Section: Electrical Characteristics Of Ge Pin Diodes On Simentioning
confidence: 99%
“…5(b), have been realized [20]. The operation frequency more than 30 GHz has been reported for such integrated devices [34,35]. Ava- lanche photodiodes of Ge with a carrier multiplication layer of Si have been also fabricated for the highly sensitive photodetection [36].…”
Section: Electrical Characteristics Of Ge Pin Diodes On Simentioning
confidence: 99%
“…Regarded as a promising platform, researchers in this field have ventured into the development of silicon photonic-based devices for high performance modulators, lasers and photodetectors. Besides the high-bandwidth photodiodes that have been demonstrated on silicon [78,79], heterogeneous integration of III-V on silicon provides an attractive way to achieve tunable lasers, broadband light sources [80], as well as optical amplifiers [81] to overcome system loss. The cross section of such directly bonded heterogenous integration incorporating a silicon waveguide with a III-V gain medium is used to demonstrate a hybrid silicon evanescent amplifier.…”
Section: Integrated Mwp For Inline Photonic Signal Processing and Fulmentioning
confidence: 99%
“…For the O-to U-bands of telecom wavelengths (1.26-1.67 μm), Germanium's cutoff wavelength of ∼1.8 μm appeals as a perfect choice. Ge-on-Si photodetectors have been in the making for three decades [36][37][38][39][40][41][42][43][44][45][46][47][48][49][50][51]. The challenge has been the material's large lattice mismatch with silicon (∼4%).…”
Section: Germanium Photodetectors On Siliconmentioning
confidence: 99%