3D Shape Measurements of Patterned Silicon Wafers

Gaudestad, Jan O.; Jiménez, Miguel; Kurtev, Kiril Ivanov; Trujillo-Sevilla, Juan M.; Luis, Guillermo Castro; Ramos-Rodríguez, Jose Manuel

doi:10.1109/asmc61125.2024.10545453

2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2024

DOI: 10.1109/asmc61125.2024.10545453

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3D Shape Measurements of Patterned Silicon Wafers

Jan O. Gaudestad,

Miguel Jiménez,

Kiril Ivanov Kurtev

et al.

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3D Shape Measurements of Patterned Silicon Wafers

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