3D printing methods for micro- and nanostructures

Fritzler, K. B.; Prinz, V. Ya.

doi:10.3367/ufnr.2017.11.038239

Cited by 6 publications

(13 citation statements)

References 206 publications

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“…This method is called EHD MJP-electrohydrodynamic multijet printing-and allows the production of components with nanometric sizes. This method was used for inkjet printing, with 0.1% gold nanoparticle solutions, to create printed gold electrodes with a width of 80 to 500 nm [44]. The electrohydrodynamic MJP printing setup is shown in Figure 7.…”

Section: Inkjet Printingmentioning

confidence: 99%

“…The development of special two-photon polymerization initiators allows an 80 nm resolution using an 808 nm infrared laser to be obtained. A reduction in the laser wavelength to 532 nm with a combination of the special initiating system contributes to a further increase in resolution to about 60 nm [44].…”

Section: Two-photon Polymerization (Tpp) As a High-resolution 3d Prinmentioning

confidence: 99%

“…Multijet (HID lamp/LED lamp) [44][45][46] High resolution, multiple materials available. Possibility of printing with multiple materials at the same time.…”

Section: Stereolithographymentioning

confidence: 99%

“…The use of a laser wavelength corresponding directly to the absorption of the photoinitiator limits the maximum print resolution according to the Abbe diffraction limit. The minimum resolvable distance d can be calculated from the Abbe diffraction limit as follows [ 44 ]:

where NA is the numerical aperture of a laser optical system, and λ is wavelength of the laser.…”

Section: High Accuracy Photopolymerization-based 3d Printing Procementioning

confidence: 99%

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A New Approach to Micromachining: High-Precision and Innovative Additive Manufacturing Solutions Based on Photopolymerization Technology

Fiedor

Ortyl

2020

Materials

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The following article introduces technologies that build three dimensional (3D) objects by adding layer-upon-layer of material, also called additive manufacturing technologies. Furthermore, most important features supporting the conscious choice of 3D printing methods for applications in micro and nanomanufacturing are covered. The micromanufacturing method covers photopolymerization-based methods such as stereolithography (SLA), digital light processing (DLP), the liquid crystal display–DLP coupled method, two-photon polymerization (TPP), and inkjet-based methods. Functional photocurable materials, with magnetic, conductive, or specific optical applications in the 3D printing processes are also reviewed.

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Section: Inkjet Printingmentioning

confidence: 99%

Section: Two-photon Polymerization (Tpp) As a High-resolution 3d Prinmentioning

confidence: 99%

“…Multijet (HID lamp/LED lamp) [44][45][46] High resolution, multiple materials available. Possibility of printing with multiple materials at the same time.…”

Section: Stereolithographymentioning

confidence: 99%

where NA is the numerical aperture of a laser optical system, and λ is wavelength of the laser.…”

Section: High Accuracy Photopolymerization-based 3d Printing Procementioning

confidence: 99%

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A New Approach to Micromachining: High-Precision and Innovative Additive Manufacturing Solutions Based on Photopolymerization Technology

Fiedor

Ortyl

2020

Materials

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“…Instead, the AM of microstructures and MEMS (micro-electro-mechanical systems) is based on dedicated processes that are still under development and validation. In particular, some relevant process performances such as accuracy, resolution, and repeatability are not fully consolidated, and materials availability is still limited [1][2][3][4][5][6][7][8][9][10]. The AM processes are classified into seven categories according to the international standard [11]: binder jetting, directed energy deposition, material extrusion, material jetting, powder bed fusion, sheet lamination, and vat photopolymerization.…”

Section: Introductionmentioning

confidence: 99%

Additive Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

Pasquale

2021

Micromachines

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Recently, additive manufacturing (AM) processes applied to the micrometer range are subjected to intense development motivated by the influence of the consolidated methods for the macroscale and by the attraction for digital design and freeform fabrication. The integration of AM with the other steps of conventional micro-electro-mechanical systems (MEMS) fabrication processes is still in progress and, furthermore, the development of dedicated design methods for this field is under development. The large variety of AM processes and materials is leading to an abundance of documentation about process attempts, setup details, and case studies. However, the fast and multi-technological development of AM methods for microstructures will require organized analysis of the specific and comparative advantages, constraints, and limitations of the processes. The goal of this paper is to provide an up-to-date overall view on the AM processes at the microscale and also to organize and disambiguate the related performances, capabilities, and resolutions.

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