2021
DOI: 10.2478/msr-2021-0011
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3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Abstract: This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa … Show more

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Cited by 6 publications
(1 citation statement)
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“…In equation (2), 'W' represents the aperture of the IDT, ' S ( ) Î ' [15] represents epsilon as the function of slowness and slowness (S = 1/V f , S = V m ).…”
Section: Charge Distributionmentioning
confidence: 99%
“…In equation (2), 'W' represents the aperture of the IDT, ' S ( ) Î ' [15] represents epsilon as the function of slowness and slowness (S = 1/V f , S = V m ).…”
Section: Charge Distributionmentioning
confidence: 99%