2023
DOI: 10.1002/adfm.202304991
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3D‐Printed Electrostatic Microactuators for Flexible Microsystems

Abstract: Developing small‐scale, lightweight, and flexible devices with integrated microactuators is one of the critical challenges in wearable haptic devices, soft robotics, and microrobotics. In this study, a novel fabrication process that leverages the benefits of 3D printing with two‐photon polymerization and flexible printed circuit boards (FPCBs) is presented. This method enables flexible microsystems with 3D‐printed electrostatic microactuators, which are demonstrated in a flexible integrated micromirror array a… Show more

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Cited by 8 publications
(3 citation statements)
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References 44 publications
(60 reference statements)
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“…Remarkably, their fabrication method allowed the authors to orient the actuators perpendicular to the fabrication substrate. Recently, Kim et al developed a methodology for the fabrication of DEAs using DLW and sputtered metallic layers, which they applied in the fabrication of actuating micromirrors and a crawling microrobot [137,138]. Such an approach is very promising for the realization of complex, miniaturized structures.…”
Section: Electro-active Polymersmentioning
confidence: 99%
“…Remarkably, their fabrication method allowed the authors to orient the actuators perpendicular to the fabrication substrate. Recently, Kim et al developed a methodology for the fabrication of DEAs using DLW and sputtered metallic layers, which they applied in the fabrication of actuating micromirrors and a crawling microrobot [137,138]. Such an approach is very promising for the realization of complex, miniaturized structures.…”
Section: Electro-active Polymersmentioning
confidence: 99%
“…3D constructs can be fabricated by guiding the focused laser beam within the photoactive materials along a CAD path, achieving resolution that surpasses the optical diffraction limit. The application of TPP technology has spread across various fields, including microelectromechanical systems (MEMS) [105], microfluidics [106], microoptics [107], biomedicine [108], sensors [109], and microrobotics [110,111]. Since the printing resolution plays a crucial role in replicating the native microenvironment of the ECM for hydrogel constructs, TPP is considered an ideal method for creating tissue scaffolds.…”
Section: D Printing Based On Tppmentioning
confidence: 99%
“…On the other hand, electrostatic actuation, which is compatible with the microfabrication process, offers a fast response and minimal power consumption [12,13]. Yet, this approach still has practical and technological limitations, notably in terms of limited force and displacement [3].…”
Section: Introductionmentioning
confidence: 99%