2009 IEEE International Conference on 3D System Integration 2009
DOI: 10.1109/3dic.2009.5306561
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3D integration technology for set-top box application

Abstract: In this paper, the technological bricks specifically developed for 3D integration of a set top box demonstrator will be presented. The integration flow was based on the 45 nm technology top chip stacked on a 130 nm technology active bottom wafer [1]. This flow needed to develop specific wafer level packaging technologies such as: • Top chip & bottom chip interconnections • High aspect ratio TSV included into the bottom wafer • Backside interconnections for subsequent packaging step • Temporary bonding and debo… Show more

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Cited by 15 publications
(2 citation statements)
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“…The TSV last technology is very flexible and can be applied to many domains and applications [3]. A simplified process flow diagram is presented in figure 8.…”
Section: Technology Descriptionmentioning
confidence: 99%
“…The TSV last technology is very flexible and can be applied to many domains and applications [3]. A simplified process flow diagram is presented in figure 8.…”
Section: Technology Descriptionmentioning
confidence: 99%
“…The two layers are linked together through microbumps (Copper Pillars [10]). This approach avoids the classical limitation of area when eFPGA is embedded inside the same silicon layer.…”
Section: B Global Architecturementioning
confidence: 99%