3D Imaging and Quantitative Subsurface Dielectric Constant Measurement Using Peak Force Kelvin Probe Force Microscopy
Khaled Kaja,
Ammar Assoum,
Peter De Wolf
et al.
Abstract:Noninvasive and depth‐sensitive measurements of dielectric properties are becoming of great interest in advanced and complex nanostructured architectures. Here, a straightforward parallel approach applicable in peak force Kelvin probe force microscopy for a 3D measurement of dielectric constants at the nanoscale is demonstrated. The proposed approach features a simultaneous measurement of the mechanical, electrical, and depth‐dependent dielectric properties applied to embedded nanostructures. The findings prov… Show more
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