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Epitaxial growth of high quality WO3 thin films

“…18,19 Films prepared on glass or Si substrates usually have amorphous or polycrystalline structure and rough surfaces. 9,15 Growth of epitaxial films of WO 3 on single-crystal substrates such as SrTiO 3 , MgO, and sapphire has been reported as well. 13,16,18,20 However, because of large lattice mismatch, the surface morphology of these films has been inadequate for superlattice growth or for surface-sensitive experiments such as electrolyte gating, [21][22][23][24][25][26] which generally require atomically flat surfaces and interfaces with a root-mean-square (rms) roughness less than 1 nm.…”

“…[1][2][3][4][5] It is also very sensitive to NO x exposure, and hence it is used to fabricate gas sensors. [6][7][8][9][10] Both of these applications require WO 3 to be grown in a thin film form. Various methods have been used to prepare WO 3 thin films, including thermal evaporation, 2,7,11,12 chemical vapor deposition (CVD), 9,13 sputtering, 6,8,[14][15][16][17] and pulsed laser deposition (PLD).…”

Effect of N5+ ion implantation on optical and gas sensing properties of WO3 films

“…This material has also attracted interest as a promising gas sensor with respect to NO 2 , NH 3 , O 3 , H 2 S and CO etc. gases . As per literature review, the gas sensing behaviours of WO 3 films in the presence of methane as well as other hydrocarbon gases are not good enough and have been studied by few researchers only.…”

Влияние имплантации ионов Ba-=SUP=-+-=/SUP=- на состав и электронные свойства пленок MoO-=SUB=-3-=/SUB=-/Mo (111)

“…Пленки оксида молибдена и системы на их основе широко используются в различных областях электронной и химической промышленности, в частности, при получении чистого Mo и его сплавов, при получении катализаторов для переработки нефти и нефтепродуктов, имеют перспективы в создании OLED-дисплеев, световых резонаторов и фильтров, сенсоров и солнечных элементов [1][2][3][4][5]. На физические и химические свойства MoO 3 существенно влияет действие различных факторов (электронная и ионная бомбардировка, облучение светом, адсорбция и диффузия инородных атомов и молекул).…”