The Proceedings of Conference of Tokai Branch
 2007
DOI: 10.1299/jsmetokai.2007.56.137
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311 Strength evaluation of silicon based on fracture mechanics and characterization of damage

Kazuaki Hirata
1
,
Takuya Ozeki
2
,
Shoji Kamiya
3
et al.

Abstract: Strength evaluation ofsilicon based on fracture mechanics and characterization ofdamage

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