2012
DOI: 10.1364/oe.20.011031
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310 GHz gain-bandwidth product Ge/Si avalanche photodetector for 1550 nm light detection

Abstract: We report a normal incidence Ge/Si avalanche photodiode with separate-absorption-charge-multiplication (SACM) structure by selective epitaxial growth. By proper design of charge and multiplication layers and by optimizing the electric field distribution in the depletion region to eliminate germanium impact-ionization at high gain, a high responsivity of 12 A/W and a large gain-bandwidth product of 310 GHz have been achieved at 1550 nm.

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Cited by 83 publications
(50 citation statements)
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“…Avalanche operation of germanium-based photodiodes has been demonstrated in separate absorption charge multiplication 3,20 and metal semiconductor metal 4 structures. On the one hand, the first ones exhibit low multiplication noise thanks to the use of Si in the multiplication layer.…”
mentioning
confidence: 99%
“…Avalanche operation of germanium-based photodiodes has been demonstrated in separate absorption charge multiplication 3,20 and metal semiconductor metal 4 structures. On the one hand, the first ones exhibit low multiplication noise thanks to the use of Si in the multiplication layer.…”
mentioning
confidence: 99%
“…The mesa diameter is 50 µm. The dark current at 95% breakdown is ~ 350 nA, which is approximately 100x lower than that of Ge on Si APDs [18][19][20] and comparable to that of AlInAs/InGaAs APDs. 15,23 The step in the photocurrent near -38 V occurs when the edge of the depletion region reaches the absorbing layer, which is referred as punch-through.…”
Section: Performance and Analysismentioning
confidence: 82%
“…One approach has been to combine a Ge absorption region with a Si multiplication layer in an SACM APD. [18][19][20] These APDs have achieved comparable to the best III-V compound APDs but not superior, as would have been expected owing to their low k value. The reason is that their high dark current, which arises from the lattice mismatch between Ge and Si, contributes enough to the noise to offset the lower excess noise factor.…”
Section: Introductionmentioning
confidence: 90%
“…Slightly beyond 2V, there is avalanche multiplication which increases the responsivity by a gain factor of �2 at 5V [7]. With this effect, higher detector sensitivity can be obtained with a simple pin PD by using a higher operation voltage, as opposed to a more complicated separate absorption-charge multiplication (SACM) avalanche photo detector (APD) structure [4]. Onset of avalanche multiplication is observed for all the devices giving a gain factor of �2 at 5V.…”
Section: Resultsmentioning
confidence: 99%