31‐2: Invited Paper: Nanostructures Oxide Thin‐Film Transistors Fabricated by Near‐Field Nanolithography with Enhanced Device Performance

Abstract

We have developed oxide TFTs with nanostructure by using a strategy based on near-field nanolithography, such as wrapping insulator structure with nano-splitting active layer or nanoscale and periodic degenerately doped heterostructures. These nanostructured TFTs enhanced in device performance, compared with normal single gate homogeneous IGZO TFTs.