Scaling of high-order harmonic generation ͑HHG͒ efficiency versus drive wavelength is experimentally studied using 800 and 400 nm pulses and theoretically modeled for visible drive wavelength. We demonstrate good agreement of experimental results with the calculations from a recently established semianalytic HHG model and discuss the feasibility of efficient-HHG-based extreme ultraviolet sources driven by visible ultrafast lasers. Our study shows that efficiencies of Ͼ10 −5 can be achieved at ϳ90 eV by selecting appropriate drive wavelengths with He under good phase matching conditions. The spectral band formed by the extreme ultraviolet ͑EUV͒ and soft-x-ray region, called XUV range, has been one of the most recent frontiers of science being explored. Motivated by the possibility of having combined spatial resolution of tens of nanometers and temporal accuracy of tens of attoseconds, the XUV wavelength range is very attractive for many research areas such as nanoscience, physics, biology, and chemistry. Due to its superb coherence properties in space and time and compactness, high-order harmonic generation ͑HHG͒ is becoming a popular XUV source. However, one major aspect still limiting the applicability of HHG is its low conversion efficiency. Until recently, HHG has been mostly pursued with Ti:sapphire lasers centered at 800 nm, since they have been the most reliable high-power sub-100-fs sources. 1 Efficient HHG with the efficiency of ϳ10 −4 at up to 60 eV was reported using a superposition of 800 and 400 nm pulses with orthogonal polarization. 2 However, conventional HHG driven by a single-color pulse is relatively inefficient for energies above ϳ45 eV, exhibiting typical efficiencies of 10 −7 to 10 −8 . 1 In this paper, we present a detailed experimental and theoretical study of HHG efficiency scaling, showing that if the final objective is to generate radiation in the range of 30-100 eV, the use of shortwavelength ultrashort driver pulses leads to order-ofmagnitude improvement in the efficiency of the single-colordriven HHG.It is well known from the three step model that the cutoff energy, E cutoff , is given by the following: 3where I p is the ionization potential, e and m are the electron charge and mass, and E 0 and 0 are the driver field amplitude and frequency. Equation ͑1͒ indicates that the cutoff can be extended by using low-frequency ͑or long-wavelength͒ driver pulses and maximizing the electric field amplitude. [3][4][5][6] Recently, very short wavelength XUV radiation ͑Ͼ200 eV͒ was demonstrated using long-wavelength drivers at 1.6 m and even 2 m, 4-6 but the efficiencies unfavorably scale with drive wavelength, which will be discussed below, significantly limiting its application so far. In contrast, there are still many important applications in the range of 30-100 eV that require very high photon flux, such as EUV lithography, seeding of x-ray free-electron lasers, and attosecond spectroscopy. For these applications, the use of short driving wavelength combined with electric field amplitudes sli...