3 kHz XeCl Excimer Laser Using New Type of Electrode

Ishii, Akira; Yasuda, Kôichi; Okita, Yuji; Tamagawa, T.

doi:10.1143/jjap.34.2324

Cited by 6 publications

(6 citation statements)

References 15 publications

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“…It was confirmed that the improvement of the discharge current distribution contributed to the increase of the HRR output power, suppressing a discharge constriction effectively and thus extending the electrode lifetime. 16 Moreover, pin electrodes not only dissipate by spattering, but also contaminate internal surfaces and optics of a chamber. An intense UV light is likely to damage chamber materials and pollutes laser gas.…”

Section: Stabilization Of Dischargementioning

confidence: 99%

Development of key components and technologies for a high repetition rate and high-power excimer laser

Goto

Takagi

Kakizaki

et al. 1998

Review of Scientific Instruments

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Articles you may be interested inThe influence of the pulse length on the drilling of metals with an excimer laser Key components and technologies have been developed for an ultrahigh repetition rate XeCl excimer laser of 5 kHz to be used for industrial applications. A compact axial blower having a revolution rate of up to 10 000 min Ϫ1 and a maximum pressure of 16.2 kPa in air was made with a canned magnetic coupler to circulate a laser gas at a flow velocity of over 150 m/s in a discharge region. Materials constituting a laser chamber were tested to prevent discharge instability by gas contamination to enable long time operation. The dominant cause of the instability was investigated by a simple simulation. For a preionization, a novel sealed-off x-ray tube was developed to compare the suitability in a high repetition rate operation with that of conventional UV preionization. The gas due to the shock and acoustic waves generated by discharge pulses was measured to design the damper, which enabled the suppression of the gas turbulence by around a tenth. To simplify cumbersome laser maintenance, a new power supply provided by a novel fast switching semiconductor device was evaluated by operating the laser. The experimental laser apparatus integrating these key components and technologies was operated to confirm the practical availability for high repetition of up to 5 kHz. Many kinds of basic experiments have been performed to increase repetition rate, average power, and reliability. Though these experimental results have not yet been integrated and performed simultaneously, we have achieved operation up to an average output power of 0.56 kW at 5 kHz. Based on the results and empirical knowledge, the prospect for a practical high repetition rate excimer laser was discussed.

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Section: Stabilization Of Dischargementioning

confidence: 99%

Development of key components and technologies for a high repetition rate and high-power excimer laser

Goto

Takagi

Kakizaki

et al. 1998

Review of Scientific Instruments

Self Cite

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“…Chang,4) Hermsen,5) and Ishii et al 6) developed new electrode shapes to obtain a uniform electric field distribution in a discharge cavity. Kakizaki et al 7) successfully increased the repetition rate of an ArF laser system from 4 to 6 kHz by improving the electrode profile and gas uniformity between the electrodes.…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…Many attempts have been made to increase the repetition rate of an excimer laser [1][2][3][4][5][6][7][8][9] to satisfy the requirements of the many potential applications. Chang, 4) Hermsen, 5) and Ishii et al 6) developed new electrode shapes to obtain a uniform electric field distribution in a discharge cavity. Kakizaki et al 7) successfully increased the repetition rate of an ArF laser system from 4 to 6 kHz by improving the electrode profile and gas uniformity between the electrodes.…”

Section: Introductionmentioning

confidence: 99%

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Characteristics of Double-Pulse Discharge in Supersonic Flow for Excimer Laser Excitation

Son¹,

Imada

Suzuki

et al. 2007

jjap

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The development of a high-repetition-rate excimer laser is a vital requirement for providing a high average power and a high throughput. However, its development has been limited by various factors produced by excitation discharge. In this study, a double-pulse discharge method in a supersonic flow with a Mach number of 2.0 is used to simulate a high-repetition-rate excimer laser. An equivalent repetition rate f for the stable discharge of as high as 17 kHz is obtained. A glow discharge is also obtained between the electrodes at f ¼ 20 kHz; however, a discharge between the cathode and the UV pins appears almost simultaneously. At f ! 25 kHz, the second discharge becomes an arc through the heated column produced by the former discharge or in the region downstream of the shock wave moving upstream from the heated column. It is clearly demonstrated in this study that not only the heated column but also the shock wave has a key effect on the stability of the subsequent discharge. From the results, a formula for estimating the maximum repetition rate in a supersonic flow is proposed.

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“…The mechanisms affecting the plasma stability and their origin have been studied experimentally and theoretically, like the effect of the preionization density [9], electrodes non-alignment [10], the influence of the discharge current and the dynamic of the discharge contraction [11], the formation and development of filamentation [12]. In order to optimize the parameters of the discharge and the average power of excimer lasers [13][14][15], some authors focus on the role of the cathode sheath in initiation of these instabilities [16][17][18][19][20]. The aim of this paper is to study particularly the effect of halogen depletion and the non-uniform preionization on the propagation and amplification of instabilities in the volume of the XeCl laser [21,22].…”

Section: Introductionmentioning

confidence: 99%

Simple model of halogen depletion in XeCl discharge pumped lasers

Boutarfaïa¹,

Harrache²,

Hamed³

2004

Plasma Devices and Operations

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The aim of this work is to study the development of the macroscopic non-uniformity of the electron density of high pressure discharge for excimer lasers and eventually its propagation because of the medium kinetics phenomena. This study is executed using a transverse mono-dimensional model, in which the plasma is represented by a set of resistances in parallel. The time variations of the electron density in each plasma element are obtained by solving a set of ordinary differential equations describing the plasma kinetics and external circuit. The use of the present model allows a good comprehension of the halogen depletion phenomena, which is the principal cause of laser operation premature termination and allows a simple study of a large-scale non-uniformity in preionization density and its effects on plasma electrical and chemical properties. The results obtained indicate clearly that about 50% of halogen is consumed at the end of the pulse.

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3 kHz XeCl Excimer Laser Using New Type of Electrode

Cited by 6 publications

References 15 publications

Development of key components and technologies for a high repetition rate and high-power excimer laser

Development of key components and technologies for a high repetition rate and high-power excimer laser

Characteristics of Double-Pulse Discharge in Supersonic Flow for Excimer Laser Excitation

Simple model of halogen depletion in XeCl discharge pumped lasers

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