3-Dimensional Electrodes for Microbatteries

Chamran, F.; Yeh, Yu-Ting; Dunn, Bruce; Kim, Chang‐Jin

doi:10.1115/imece2004-61925

Cited by 6 publications

(5 citation statements)

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“…Tel. : +1 310 825 1519; fax: +1 310 206 7353. recently for a nickel-zinc microbattery [3], a zinc-air microbattery [4] and carbon post electrodes for lithium-ion batteries [5][6][7]. In the latter studies, the individual posts were at least 10 m thick.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and properties of a carbon/polypyrrole three-dimensional microbattery

Min

Park

Taherabadi

et al. 2008

Journal of Power Sources

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186

146

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Section: Introductionmentioning

confidence: 99%

Fabrication and properties of a carbon/polypyrrole three-dimensional microbattery

Min

Park

Taherabadi

et al. 2008

Journal of Power Sources

Self Cite

186

146

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“…After dicing the wafer into 1 1 cm dice, a simple photoresist mask (NR9-8000) was patterned to define the area for electrochemical etching before each die was mounted in a custom-built Teflon cell [ Fig. 3(b)] [23] for electrochemical etching. Liquid In-Ga was painted on the backside of the sample to provide good electrical contact between the sample and the copper jig in the Teflon cell.…”

Section: A Fabrication Of Free-standing Porous Polysilicon Membranementioning

confidence: 99%

On-Wafer Monolithic Encapsulation by Surface Micromachining With Porous Polysilicon Shell

Kim

2007

J. Microelectromech. Syst.

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Abstract-In this paper, we present a novel microfabrication technique that solves the main problems of existing monolithic on-chip encapsulation methods for polysilicon surface micromachining. The encapsulation technique includes the formation of a nanoporous polysilicon shell, creation of a cavity by removing the sacrificial layer through the pores in the shell, and sealing the cavity at a low pressure. Formed porous by postdeposition electrochemical etching on top of a sacrificial layer, the porous polysilicon is thick enough to free-stand when released, unlike the previously reported as-deposited permeable polysilicon. Benefiting from the dense pores through the polysilicon layer, the sacrificial material was removed in just one minute, and the vacuum sealing was achieved by a low-pressure chemical vapor deposition polysilicon as thin as 1000 Å with no sealing material detected inside the cavity. The pressure inside the sealed cavity, measured by an encapsulated polysilicon Pirani gauge, was around 130 mTorr and showed no noticeable leak ( 30 mTorr) over one year. To showcase the applicability, the proposed process was demonstrated through the common Multiuser MEMS Process (MUMPs) foundry service.[1713]

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“…A route to provide both high energy and power while preserving the battery small foot print area is to move from traditional 2 dimensional (2D) Li-ion battery design to a 3 dimensional (3D) architecture (1). Various 3D-battery models have been described (1) and synthesis of nano-architectured electrodes has been reported (2)(3)(4)(5).…”

mentioning

confidence: 99%