3-Axes Flexible Tactile Sensor Fabricated by Si Micromachining and Packaging Technology

Kim, K.; Lee, K.R.; Kim, Y.K.; Lee, D.S.; Cho, N.K.; Kim, W.H.; Park, K.B.; Park, H.D.; Park, Y.K.; Kim, J.H.; Pak, James Jungho

doi:10.1109/memsys.2006.1627890

Cited by 30 publications

(15 citation statements)

References 7 publications

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“…In this year, many researchers involve their products to achieve what human life needed; a good example is a 4 × 4 array small in size and conformable using the same transducer method comparing with previous example but in a different type of material which is conductive rubber. Additionally, tactile pressure sensor can measure both normal and shear forces produced through dexterous manipulation [68,69]. However, most of existing tactile sensors only detect the normal contact force during handling objects in a robotic hand manipulation.…”

Section: Tactile Transduction Techniques and Applicationsmentioning

confidence: 99%

Pressure Sensor: State of the Art, Design, and Application for Robotic Hand

et al. 2015

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We survey the state of the art in a variety of force sensors for designing and application of robotic hand. Most of the force sensors are examined based on tactile sensing. For a decade, many papers have widely discussed various sensor technologies and transducer methods which are based on microelectromechanical system (MEMS) and silicon used for improving the accuracy and performance measurement of tactile sensing capabilities especially for robotic hand applications. We found that transducers and materials such as piezoresistive and polymer, respectively, are used in order to improve the sensing sensitivity for grasping mechanisms in future. This predicted growth in such applications will explode into high risk tasks which requires very precise purposes. It shows considerable potential and significant levels of research attention.

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Section: Tactile Transduction Techniques and Applicationsmentioning

confidence: 99%

Pressure Sensor: State of the Art, Design, and Application for Robotic Hand

et al. 2015

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“…Polymer materials have been used to solve this problem. At first, polymer materials were employed to replace the substrate, and the sensor itself was still fabricated on a silicon wafer [6]. More flexible polymer materials (polyimine, polyester, polydimethylsiloxane, parylene) have been developed, and flexible substrate MEMS technologies have been proposed for flexible tactile sensor production; thus, the problem of flexibility has been solved.…”

Section: Capacitive Sensors Array Interfacementioning

confidence: 99%

High precision intelligent flexible grasping front-end with CMOS interface for robots application

Zhang

Liu

et al. 2016

Sci. China Inf. Sci.

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This paper presents a high-precision intelligent flexible robot grasping front-end with an integrated capacitive tactile sensor array and a conditioning chip. The capacitive tactile sensor is the primary part of the front-end, it determines the overall performance. The micro-needle array sandwich structure in the tactile sensor increases the repeatability and stability, and ensures the sensitivity. The assembled sensor exhibits a saturation at 10.53 N (421 kPa) with a sensitivity of 1.9%/kPa. Furthermore, a conditioning chip is utilized in a custom readout interface to achieve better performance by reducing signal attenuation, and to increase the compatibility of the front-end. The chip is optimized for the parasitic shunt capacitance in the capacitor array. A dual bidirectional charge-discharge conversion method and a two-port detection method are matched to achieve the goal of reducing the shunting influence, and attenuating the offset voltage or the noise input effects. A prototype of the interface has been fabricated using 180-nm CMOS technology. Sensor with the value of 0.5 pF shunted by capacitors of 47 pF has been detected with an error of 1% within 100 µs.Keywords Capacitive sensor array, flexible sensor, tactile sensor, micro-needle array, bionic robot CitationHu X H, Zhang X, Liu M, et al. High precision intelligent flexible grasping front-end with CMOS interface for robots application. Sci China Inf Sci,

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“…Both flexibility and robustness should be met as the sensor is placed on a curved surface. According to Kim et al, three axes flexible tactile sensor needs packaging for sensor protection after Au wire bonding individually diced sensor chips (chip size: 1.5 mm × 1.5 mm) on the flexible PCB to obtain the flexibility and robustness of the sensor [11].…”

Section: Introductionmentioning

confidence: 99%