2023
DOI: 10.1002/sdtp.16214
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3.2: Elevating the Light Output Power Density of Scaling‐down AlGaN Ultraviolet‐C Micro‐LED

Abstract: Ultraviolet band‐C (UV‐C) micro‐light‐emitting diodes (Micro‐LEDs) with high optical power density are increasingly demanded in the utilization of sterilization, solar‐blind communications, and neuroscience for the robust structure and adjustable emission wavelength. In this work, AlGaN UV‐C Micro‐LEDs are fabricated and characterized in 5×5, 10×10, 20×20, 30×30, 50×50, 80×80, and 100×100 µm2. With pixel size scaling down, the smaller devices have the potential to emit more considerable light output power (LOP… Show more

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