29‐4: TOF SIMS for OLED Film 3D Detection and Real‐Time Failure Analysis
Kening Zheng,
Qiang Fu,
Bo Shi
et al.
Abstract:By analyzing OLED film layers using the TOF SIMS method with 3D imaging capability, we can effectively improve the detection of OLED defects and understand the constitutive relationship. This inspection method can be integrated into the production line to realize process improvement and defect interception during mass production.
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