29.2 A Scalable Quantum Magnetometer in 65nm CMOS with Vector-Field Detection Capability

Ibrahim, Mohamed I.; Foy, Christopher; Englund, Dirk; Han, Ruonan

doi:10.1109/isscc.2019.8662434

Cited by 7 publications

(6 citation statements)

References 6 publications

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“…This is challenging since any heatsink must be thin to minimize sample-diamond separation and also electrically insulating. We note that there has been important parallel effort in constructing integrated miniaturized sensors [46][47][48]. Although their reported sensitivity is several orders of magnitude worse, it is possible that by using techniques from semiconductor fabrication (particularly efficient heatsinking) that these devices may have a significant role to play in future NV biosensing.…”

Section: Discussionmentioning

confidence: 99%

Optimization of a Diamond Nitrogen Vacancy Centre Magnetometer for Sensing of Biological Signals

Webb

Troise

Hansen³

et al. 2020

Front. Phys.

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Section: Discussionmentioning

confidence: 99%

Optimization of a Diamond Nitrogen Vacancy Centre Magnetometer for Sensing of Biological Signals

Webb

Troise

Hansen³

et al. 2020

Front. Phys.

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“…In [59], [60], the above hybrid CMOS-NV architecture is extended to a scalable design with enhanced sensitivity. The design shown in Fig.…”

Section: ) Research At Mitmentioning

confidence: 99%

CMOS Integrated Circuits for the Quantum Information Sciences

Anders

Babaie

Bardin

et al. 2023

IEEE Trans. Quantum Eng.

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Over the past decade, significant progress in quantum technologies has been made and, hence, engineering of these systems has become an important research area. Many researchers have become interested in studying ways in which classical integrated circuits can be used to complement quantum mechanical systems, enabling more compact, performant, and/or extensible systems than would be otherwise feasible. In this article-written by a consortium of early contributors to the field-we provide a review of some of the early integrated circuits for the quantum information sciences. CMOS and BiCMOS integrated circuits for nuclear magnetic resonance, nitrogen-vacancy-based magnetometry, trapped-ion-based quantum computing, superconductor-based quantum computing, and quantum-dot based quantum computing are described. In each case, the basic technological requirements are presented before describing proof-of-concept integrated circuits. We conclude by summarizing some of the many open research areas in the quantum information sciences for CMOS designers.

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“…In this section, the design details of a new-generation CMOS-NV magnetometer [12] are provided. The highly scalable architecture of our CMOS-NV magnetometer allows for the microwave driving of NVs over a large area.…”

Section: A Scalable Cmos-nv Magnetometer For Enhanced Sensitivitymentioning

confidence: 99%

“…However, insufficient pump light rejection and limited area of homogeneous microwave driving fields for the ODMR measurements posed a major limitation on achievable magnetic field sensitivity. Here, we present a new CMOS prototype that addresses these problems to achieve a >100× sensitivity improvement, down to 245 nT/Hz 1/2 [12].…”

Section: Introductionmentioning

confidence: 99%

High-Scalability CMOS Quantum Magnetometer with Spin-State Excitation and Detection of Diamond Color Centers

Ibrahim

Foy

Englund

et al. 2020

Preprint

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Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This paper presents a CMOS quantum vector-field magnetometer that miniaturizes the conventional quantum sensing platforms using nitrogen-vacancy (NV) centers in diamond. By integrating key components for spin control and readout, the chip performs magnetometry through optically detected magnetic resonance (ODMR) through a diamond slab attached to a custom CMOS chip. The ODMR control is highly uniform across the NV centers in the diamond, which is enabled by a CMOS-generated ∼2.87 GHz magnetic field with <5% inhomogeneity across a large-area current-driven wire array. The magnetometer chip is 1.5 mm 2 in size, prototyped in 65-nm bulk CMOS technology, and attached to a 300×80 µm 2 diamond slab. NV fluorescence is measured by CMOS-integrated photodetectors. This on-chip measurement is enabled by efficient rejection of the green pump light from the red fluorescence through a CMOS-integrated spectral filter based on a combination of spectrally dependent plasmonic losses and diffractive filtering in the CMOS back-end-of-line (BEOL). This filter achieves ∼25 dB of green light rejection. We measure a sensitivity of 245 nT/Hz 1/2 , marking a 130× improvement over a previous CMOS-NV sensor prototype, largely thanks to the better spectral filtering and homogeneous microwave generation over larger area.

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29.2 A Scalable Quantum Magnetometer in 65nm CMOS with Vector-Field Detection Capability

Cited by 7 publications

References 6 publications

Optimization of a Diamond Nitrogen Vacancy Centre Magnetometer for Sensing of Biological Signals

Optimization of a Diamond Nitrogen Vacancy Centre Magnetometer for Sensing of Biological Signals

CMOS Integrated Circuits for the Quantum Information Sciences

High-Scalability CMOS Quantum Magnetometer with Spin-State Excitation and Detection of Diamond Color Centers

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