27.3L: Late‐News Paper: Sub‐pixel Structured OLED Microdisplay

Abstract

New products, e.g. data-glasses

Recent progress of organic light-emitting diode microdisplays for augmented reality/virtual reality applications

“…Many researchers focus on direct patterning of the R, G, and B EMLs without CFs for improved luminance and efficiency of OLED microdisplays. In 2013, Herold et al developed the Flash-Mask-Transfer-Lithography (FMTL) technology for fabricating small and differently colored OLED subpixels on a silicon substrate [25]. As shown in Figure 3(a), the patterned reflectors and absorbers defined the pixel layout, and the organic materials for one color were deposited on top of the FMTL mask.…”

“…The R, G, and B polymers can be patterned to 2 μm, as shown in Figure 3(j), and allow full color in OLED microdisplays using direct patterning instead of a white OLED with CFs [31]. [25]. Reprinted with permission from ref.…”

“…Copyright 2013, John Wiley and Sons. (b) Various patterns using FMTL[25]. Reprinted with permission from ref [25]…”

52-2:Invited Paper: OLED Microdisplays - Enabling Advanced Near-to-Eye Displays, Sensors, and Beyond

“…Alternative approaches could involve micro-shadow-masking, flash mask transfer lithography (FMTL) [5] or electron beam patterning.…”