The growth of ZnO on stainless steel foils by MOCVD and its application in light emitting devices

Wu, Bin; Zhuang, Shiwei; Chen, Chi; Shi, Zhifeng; Jiang, Junyan; Dong, Xiaoli; Li, Wancheng; Zhang, Yuantao; Zhang, Baolin; Du, Guotong

doi:10.1039/c5cp06826f

Cited by 12 publications

(3 citation statements)

References 33 publications

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“…However, these methods are often complex and require costly vacuum equipment. In contrast, ZnO thin films can also be prepared via chemical methods, such as chemical bath deposition [12], chemical vapor deposition [13], atomic layer deposition [14], spray pyrolysis [15], printing [16], sol-gel spin coating [17], and electrochemical deposition [18], which are simpler methods and generally less costly. The conventional sol-gel method is often preferred over other chemical methods, due to its simplicity, lower crystallization temperature, and compositional control [19].…”

Section: Introductionmentioning

confidence: 99%

Structural and Optical Properties of ZnO Thin Films Prepared by Molecular Precursor and Sol–Gel Methods

et al. 2020

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Zinc oxide (ZnO) is a versatile and inexpensive semiconductor with a wide direct band gap that has applicability in several scientific and technological fields. In this work, we report the synthesis of ZnO thin films via two simple and low-cost synthesis routes, i.e., the molecular precursor method (MPM) and the sol–gel method, which were deposited successfully on microscope glass substrates. The films were characterized for their structural and optical properties. X-ray diffraction (XRD) characterization showed that the ZnO films were highly c-axis (0 0 2) oriented, which is of interest for piezoelectric applications. The surface roughness derived from atomic force microscopy (AFM) analysis indicates that films prepared via MPM were relatively rough with an average roughness (Ra) of 2.73 nm compared to those prepared via the sol–gel method (Ra = 1.55 nm). Thin films prepared via MPM were more transparent than those prepared via the sol–gel method. The optical band gap of ZnO thin films obtained via the sol–gel method was 3.25 eV, which falls within the range found by other authors. However, there was a broadening of the optical band gap (3.75 eV) in thin films derived from MPM.

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Section: Introductionmentioning

confidence: 99%

Structural and Optical Properties of ZnO Thin Films Prepared by Molecular Precursor and Sol–Gel Methods

et al. 2020

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“…[13] DEZn begins to decompose at 357 °C but high crystal quality is achieved by increasing the growth temperature (450 °C and above) at pressure ≥ 30 Torr. [14][15][16][17] The structural analysis of grown ZnO by the XRD shows an increased crystallinity for the growth temperature above 400 .…”

Section: Methodsmentioning

confidence: 99%

Optical and Structural Properties of Nickel Doped Zinc Oxide Grown by Metal Organic Chemical Vapor Deposition (MOCVD) at Different Reaction Chamber Conditions

Manzoor¹,

Saravade²,

Corda³

et al. 2020

ES Mater.Manuf.

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Metal organic chemical vapor deposition (MOCVD) growth of nickel-doped zinc oxide (Ni-doped ZnO) thin films on sapphire was investigated. The structural and optical properties were studied. The samples were grown at two substrate temperatures (i.e., 450 and 550 °C) and at three chamber pressures (22, 30 and 100 Torr). The Ni-doped ZnO samples showed the (002) hexagonal crystal structure with signs of secondary phases in X-ray diffraction (XRD) measurements. However, different XRD peak intensities were observed for these samples at different growth conditions with the same Ni flow rate injection to the reaction chamber. The samples grown at different growth conditions had different optical absorption spectra. Results prove that the growth at a low pressure and temperatures close to the decomposition temperature of the precursors resulted in an optimum dopant incorporation, sharp absorption band edges, and good crystalline quality.

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“…One candidate is metal which is the "structural material" with toughness, ductility, high temperature stability, and/or low cost. There are some reports on ZnO deposited directly on metal substrates, [27][28][29] but metal substrates are not commonly used due to the following difficulties. Metal as a structural material usually does not require the surface flatness.…”

Section: Introductionmentioning

confidence: 99%

Solution deposition planarization of stainless steel foil for fabricating Al-doped ZnO film

Hiraoka,

Matsumoto,

Horide

2023

Jpn. J. Appl. Phys.

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ZnO exhibits various properties, and fabrication of ZnO (including doped ZnO) films are required for device and energy applications. Metals such as stainless steel (SUS) are promising substrates, but deposition of flat films is difficult on as-received metals because of surface roughness. In addition, when films are deposited directly on metals, the electrical resistance is dominated by the substrate. To overcome these problems, solution deposition planarization (SDP) was investigated for SUS. SiO2 solution was spin-coated and heat-treated in air to prepare a flat SDP layer. Flat polycrystalline films of Al-doped ZnO (AZO) were fabricated on the SDP layer. The electrical resistance of AZO/SDP/SUS was determined by AZO, the influence of the SUS is not observed. Thus, the insulation and planarization were simultaneously achieved by the SDP layer. This study shows that polycrystalline AZO films can be deposited on metals with the SDP without a complicated intermediate multilayer structure.

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The growth of ZnO on stainless steel foils by MOCVD and its application in light emitting devices

Cited by 12 publications

References 33 publications

Structural and Optical Properties of ZnO Thin Films Prepared by Molecular Precursor and Sol–Gel Methods

Structural and Optical Properties of ZnO Thin Films Prepared by Molecular Precursor and Sol–Gel Methods

Optical and Structural Properties of Nickel Doped Zinc Oxide Grown by Metal Organic Chemical Vapor Deposition (MOCVD) at Different Reaction Chamber Conditions

Solution deposition planarization of stainless steel foil for fabricating Al-doped ZnO film

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