2306 Progressive Wave Type Piezoelectric Pump : Behavior of vibration plate

Abstract

This study is about a novel small piezoelectric pump ． The pump utMzes a thin vibration plate on which bimorph type piezoelectric actuators generate progressive wave ， Characteristies of the pump are investigated by eXperiments ． 工 t is observed that direction of flow depends on driving frequency and the 血 rection does not always agree with phase of driVing voltage signals apphedto the piezoelecthc elements ，Behaviors of several part of the Vibration plate in the pump ease f且ユ ed or not f皿 ed with water are investigated with laserDoppler Vibration sensor ． Itお clari 丘edthat phase ofsinusoidal Vibration ofthe each part does not agree with the phase of driving signal ． Interaetion between Vibration plate and water may cause the phellomenon ．