22am2-E6 Prototype of Electromagnetic MEMS Energy Harvester by Using NdFeB Sputter to Si Formed Micro Unevenness

Abstract

This paper shows the fabrication of the prototype of electromagnetic MEMS energy harvester and the power generation experiment al results. The electromagnetic energy harvester consists of the sputtered NdFeB magnet film on high aspect ratio corrugated Si trench and the Au serpentine coil. The each structure of the device is fabricated with the optimum geometry designed by the FEM simulation. In the result, we obtained 2.65 mV of the induced electromotive force and 7.60 nW of the output power. The experimental results agreed well with simulation results, and we confirmed the usefulness of the analytical method for the estimation of the power generation.