22.5: 7 inch Digital Micro Shutter Display Driven by IGZO Oxide TFT

Abstract

Digital Micro Shutter (DMS) Display based on MEMS design and process technologies provides wide color gamut, wide operating temperature range and low power consumption, compared with LCD and OLED which widely are used at the present time. Conventionally, DMS display was driven by LTPS TFT because of its high frequency operation. Oxide TFT as represented by IGZO has higher performance and reliability than a-Si TFT, as well as better productivity for large display than LTPS TFT. The IGZO oxide TFT can be applied to drive DMS display with good performance. It means that uniquely high performance and large size DMS displays can be produced without significant investment.In this paper, technologies and performance of 7 inch diagonal DMS display are explored.

High‐performance MEMS shutter display with metal‐oxide thin‐film transistors and optimized MEMS element

“…MEMS shutters have inherent high‐speed operation capability, but the operation is limited between open and closed state. So grayscale generation during display operation can be achieved using digital field sequential driving, 13 which necessitates higher mobility TFTs such as low‐temperature polycrystalline oxide (LTPS) or metal‐oxide TFTs. Our group had reported the integration of large area MEMS technology with a‐Si:H TFTs 5–7 as well as LTPS TFTs 14 before, and metal‐oxide TFT integration has been investigated in this work.…”

Power reduction of micro‐electro‐mechanical system shutter display by temporal smoothing of image signal

“…A use of field sequential color method is one of the solutions for reducing the loss due to color filters. Micro‐electro‐mechanical system (MEMS) shutter display, in which MEMS shutter controls the light output of the pixel, is one of the displays adopting the field sequential color method. Since the display does not use polarizers and color filters, utilization efficiency of the light is high.…”