2012 IEEE International Frequency Control Symposium Proceedings 2012
DOI: 10.1109/fcs.2012.6243723
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2.97-GHz CVD diamond ring resonator with Q >40,000

Abstract: A capacitive-gap transduced micromechanical ring resonator based on a radial contour vibration mode and constructed from hot filament CVD boron-doped microcrystalline diamond has achieved a Q of 42,900 at 2.9685GHz that represents the highest series-resonant Q yet measured at this frequency for any on-chip room temperature resonator, as well as the highest f Q of 1.27×10 14 for acoustic resonators, besting even macroscopic bulk-mode devices. Values like these in a device occupying only 870μm 2 may soon make po… Show more

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Cited by 15 publications
(10 citation statements)
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“…Although this facilitated stem hole lithography to the point of making the process possible, it also shifted the lengths of the spoke support beams so that they no longer were quarter-wavelength. As detailed in [6], without quarter-wavelength supports, spoke-supported ring resonator Q's suffer greatly.…”
Section: B Two-ring Array-compositementioning
confidence: 99%
See 1 more Smart Citation
“…Although this facilitated stem hole lithography to the point of making the process possible, it also shifted the lengths of the spoke support beams so that they no longer were quarter-wavelength. As detailed in [6], without quarter-wavelength supports, spoke-supported ring resonator Q's suffer greatly.…”
Section: B Two-ring Array-compositementioning
confidence: 99%
“…Capacitive-gap transduced resonators, on the other hand, do possess sufficient Q at the needed frequencies, with Q's greater than 40,000 already demonstrated at 3 GHz by polydiamond ring resonators [6]. Unfortunately, capacitive-gap resonators suffer in the transducer coupling department, as the (C x /C o )'s so far demonstrated at GHz frequencies are far short of the requirement when a tuning inductor is not available to remove shunt capacitance C o , as was done in [7].…”
mentioning
confidence: 99%
“…Oscillators based on micro-electromechanical system (MEMS) resonators have recently become viable alternatives to traditional quartz versions owing to their small size, high quality factor and single-chip integration with the CMOS process. (1,2) Compared with other resonator types, vibrating MEMS capacitive disk resonators have more applications because of recent advances that yield on-chip resonators with Qs over 40000 at 3 GHz (3,4) and excellent thermal (5) and aging stabilities. (6) Unfortunately, although the Qs of the described resonators are exceptional, they are not easy to access, because impedances mismatch with systems using them.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, this fact has driven efforts to maximize resonator Q for use in advanced RF channel-select communication schemes that utilize a bank of narrowband filters to eliminate not only out-of-band blockers, but also in-band ones, thereby allowing use of a receiver architecture with substantially reduced power consumption [1]. Among available resonators, capacitive-gap transduced ones constructed in poly-Si or diamond easily achieve the Q's greater than 20,000 needed for RF channel-selection at GHz frequencies [2], but suffer from high motional impedance. In the meantime, resonators using piezoelectric transduction [3] offer low motional impedance but insufficient Q (~1,500) for RF channel-selection.…”
Section: Introductionmentioning
confidence: 99%