1P1-O04 Development of a MEMS Capacitive Ultrasonic Sensor Usable for Both Receiver and Transmitter Having Parylene Diaphragm

Furukawa, Katsuhide; Ono, Daisuke; Aoyagi, Shigeaki; Tanaka, Takashi; Inoue, Kouji; Yamashita, K.; Okuyama, Masanori

doi:10.1299/jsmermd.2007._1p1-o04_1

Robomech

2007

DOI: 10.1299/jsmermd.2007._1p1-o04_1

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1P1-O04 Development of a MEMS Capacitive Ultrasonic Sensor Usable for Both Receiver and Transmitter Having Parylene Diaphragm

Katsuhide Furukawa

Daisuke Ono

Shigeaki Aoyagi

et al.

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1P1-O04 Development of a MEMS Capacitive Ultrasonic Sensor Usable for Both Receiver and Transmitter Having Parylene Diaphragm

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