17-30 GHZ Reliable and Compact Analog Phase Shifter Using Lateral Micromachined Sp7t Switches, and DMTL Arrays

Dey, Sukomal; Koul, Shiban K.; Poddar, Ajay K.; Rohde, A

doi:10.2528/pierc21082002

Cited by 1 publication

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References 27 publications

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“…Grant et al [ 2 ] address the fundamentals of RF switches, providing a comparison between semiconductor and RF MEMS switches. RF MEMS switches are widely used in radar [ 3 ], satellite communication systems [ 4 ], smart antennas with beam forming and phased array capabilities [ 5 ], tunable filters [ 6 ], phase-shifting networks [ 7 ] and other important fields. Daneshmand et al [ 4 ] describe the potential applications of RF MEMS switch matrices in the satellite industry, wherein mass reduction and performance improvement are crucial.…”

Section: Introductionmentioning

confidence: 99%

Novel High Isolation and High Capacitance Ratio RF MEMS Switch: Design, Analysis and Performance Verification

et al. 2022

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In this paper, a novel high isolation and high-capacitance-ratio radio-frequency micro-electromechanical systems (RF MEMS) switch working at Ka-band is designed, fabricated, measured and analyzed. The proposed RF MEMS switch mainly consists of a MEMS metallic beam, coplanar waveguide (CPW) transmission line, dielectric layer and metal–insulator–metal (MIM) fixed capacitors. The measured results indicate that the insertion loss is better than 0.5 dB at 32 GHz, and the isolation is more than 35 dB at the resonant frequency. From the fitted results, the capacitance ratio is 246.3. Compared with traditional MEMS capacitive switches, this proposed MEMS switch exhibits a high capacitance ratio and provides a wonderful solution for cutting-edge performance in 5G and other high-performance applications.

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