International Electron Devices Meeting. IEDM Technical Digest
DOI: 10.1109/iedm.1997.650401
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16-60 V rated LDMOS show advanced performance in a 0.72 μm evolution BiCMOS power technology

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Cited by 26 publications
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“…In addition, for cost and reliability reasons, there is a continuous trend for integrating these transistors in the low voltage CMOS process instead of using discrete devices. Hence the so-called ''smart power technologies": technologies with a deep submicron core, embedded memory, and integrated power devices [5][6][7][8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…In addition, for cost and reliability reasons, there is a continuous trend for integrating these transistors in the low voltage CMOS process instead of using discrete devices. Hence the so-called ''smart power technologies": technologies with a deep submicron core, embedded memory, and integrated power devices [5][6][7][8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…It is known that the laterally diffused metal oxide semiconductor (LDMOS) is becoming increasingly important in high-power and high-voltage applications. 1) Figures 1(a) and 1(b) compare cross-sections of a typical n-type structure LDMOS and the reduced surface field (RESURF) LDMOS. 2) As can be seen, a specific feature of the RESURF LDMOS is the shallow lightly doped n-type drift region fabricated on the p-type Si substrate.…”
Section: Introductionmentioning
confidence: 99%
“…1. 1) It has been observed that the capacitance of the LDMOS devices show often anomalous characteristics as a function of applied voltage. This is modeled either by introducing an internal node at the channel/drift junction 2,3) or a resistance as a macro model.…”
Section: Introductionmentioning
confidence: 99%