15‐2: Gen 10 Excimer Laser Annealing System

Fuji, Takahiro; Yamaguchi, Yoshihiro; Suzuki, Yuki; Mikami, Takahiro; Tanigawa, Sadao

doi:10.1002/sdtp.13836

Symp Digest of Tech Papers

2020

DOI: 10.1002/sdtp.13836

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15‐2: Gen 10 Excimer Laser Annealing System

Takahiro Fuji

Yoshihiro Yamaguchi

Yuki Suzuki

et al.

Abstract: We have developed Excimer Laser Annealing system for Gen. 10 glass substrates for mass production which appropriates high resolution and large sized displays. Performance of the ELA system meets sufficiently compared to conventional ELA system. We will describe some key features and performance evaluations of the advanced ELA system.

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15‐2: Gen 10 Excimer Laser Annealing System

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References 7 publications

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