2013
DOI: 10.1364/oe.21.010831
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120 nm resolution and 55 nm structure size in STED-lithography

Abstract: Two-photon direct laser writing (DLW) lithography is limited in the achievable structure size as well as in structure resolution. Adding stimulated emission depletion (STED) to DLW allowed overcoming both restrictions. We now push both to new limits. Using visible light for two-photon DLW (780 nm) and STED (532 nm), we obtain lateral structure sizes of 55 nm, a Sparrow limit of around 100 nm and we present two clearly separated lines spaced only 120 nm apart. The photo-resist used in these experiments is a mix… Show more

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Cited by 160 publications
(121 citation statements)
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“…Proposed in the early times (Hell, 2004), writing of nanostructures based on the STED and RESOLFT concept has been experimentally realized using photochromic materials (Andrew et al 2009;Fischer et al 2010;Harke et al 2012;Li et al 2009a;Scott et al 2009;Wiesbauer et al 2013;Wollhofen et al 2013) or RSFPs . Analogously to imaging sub-diffraction features, an intensity distribution of a photoswitching laser exhibiting one or several intensity zeros is used to maintain molecules in a reactive ON-state (i.e.…”
Section: Nanoscale Writingmentioning
confidence: 99%
“…Proposed in the early times (Hell, 2004), writing of nanostructures based on the STED and RESOLFT concept has been experimentally realized using photochromic materials (Andrew et al 2009;Fischer et al 2010;Harke et al 2012;Li et al 2009a;Scott et al 2009;Wiesbauer et al 2013;Wollhofen et al 2013) or RSFPs . Analogously to imaging sub-diffraction features, an intensity distribution of a photoswitching laser exhibiting one or several intensity zeros is used to maintain molecules in a reactive ON-state (i.e.…”
Section: Nanoscale Writingmentioning
confidence: 99%
“…[16][17][18] Polarization effects in laser fabrication in 2D and 3D geometries are now explored in polymerization by DLW. [19][20][21] In addition, stimulated-emission-depletion control of 3D focal volume, [22][23][24] orientation of the deposition of self-organized materials, [ 25,26 ] the melting and oxidation of thin fi lms, [ 27 ] laser ablation, [ 28,29 ] …”
Section: Doi: 101002/adom201600155mentioning
confidence: 99%
“…This appeared to be a powerful tool to carry out original vortex-induced processing of optical materials, by enabling surface ablations with donut-shaped topologies [5,6] or the retrieval of the polarization distributions of complex light [7]. Moreover, vortex-assisted DLW, which derives from the stimulated emission depletion (STED) approach [8], has also led to super-resolution DLW [9,10]. Since structured light can be engineered on demand with spatial light modulators, with setups based on anisotropic crystals, or with specially designed plates engineered by DLW [11,12], it opens a large range of accessible shapes.…”
mentioning
confidence: 99%