11-Megapixel CMOS-Integrated SiGe Micromirror Arrays for High-End Applications

Introduction

“…In the past, imec already proved the potential of poly-SiGe for MEMS-above-CMOS integration by presenting, for example, an integrated poly-SiGe micromirror array [2] and an integrated gyroscope [3], both of them fabricated on top of aluminum-based CMOS (from an external foundry). However, the aggressive interconnect scaling, essential to the continuation of Moore's law, has led to the replacement of the traditional aluminum metallization by copper metallization, due to its lower resistivity and improved reliability [4].…”

“…In [3], imec presented CMOS-integrated gyroscopes processed on top of 0.35 µm CMOS wafers with five levels of aluminum metal interconnects. In [2], CMOS-integrated 10 cm 2 11-megapixel SiGe-based micromirror arrays were presented. The micromirror arrays were fabricated on top of planarized 0.18 µm CMOS wafers with six aluminum-based metal levels (see Fig.…”

Analog Spatial Light Modulators Based on Micromirror Arrays

“…Then, there is Silicon Light Machines, which has worked mainly on one-dimensional SLMs based on the grating light valve technology (GLV™) [ 8 ], but introduced also a two-dimensional array in 2003 [ 9 ]. Furthermore, there is the IMEC in Belgium with the largest MMA that has been published so far (11 million mirrors of ) [ 10 ].…”

A spatial light modulating LC device applicable to amplitude-modulated holographic mobile devices

“…MEMSbased SLM has recently been developed using the lowtemperature poly-SiGe MEMS process on top of standard 0.8 μm CMOS circuitry. This MEMS technology enables scaling down into 10.9-megapixel SiGe-based micro-mirror device of active area 41.6 mm × 16.8 mm with 8 μm × 8 μm pixel pitch, of which MEMS-mirror arrays are Al-coated and can be individually addressed by an analog 6 V operation for angular tilt modulation [9]. One of advantages of DMDs is reflectivity with high efficiency of incident light because of the low absorption while a main challenge remains the scaling of a limited physical active area towards applications to flat panel displays [10].…”