100-MHz ultrasonic linear array transducers based on polyurea-film

Abstract

Eight-and 32-element ultrasonic array transducers using polyurea films are fabricated and experimentally tested in this study. Aromatic polyurea thin films, prepared by vapor deposition polymerization, are suitable for use as an ultrasonic transducer. In this paper, we present two types of polyurea array transducer with 20 and 200 mm pitches. The polyurea films were prepared through vapor deposition polymerization, and miniature electrode arrays were fabricated by a lithographic technique. Resonance frequencies of approximately 30, 65, and 100 MHz were observed in the electrical admittance. To examine the performances of the prototype array transducers, a pulse/echo test and phased array experiment were performed. From the experimental results, we found that the polyurea array transducers fabricated by the proposed method correctly operated as expected.

10 MHz Thin-Film PZT-Based Flexible PMUT Array: Finite Element Design and Characterization

“…Qiu et al [ 4 ] discussed fabrication, electrical integration, and electrical and acoustic measurements of PMUT arrays for sensing, actuation and imaging. Nakazawa et al [ 5 ] fabricated eight-element, 200 µm pitch and 32-element, 20-µm pitch, 1D arrays based on a polyurea film, and experimentally measured the resonance frequencies at 30 MHz, 65 MHz, and 100 MHz. Cheng et al [ 6 ] reported a 2D PMUT array consisting of 20 diaphragms, with each diaphragm having 60 µm diameter, and showed its resonance frequency at 8 MHz with 62.5% bandwidth.…”