2023
DOI: 10.1364/optica.484549
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100  GHz bandwidth, 1 volt integrated electro-optic Mach–Zehnder modulator at near-IR wavelengths

Abstract: Integrated photonics at near-IR (NIR) wavelengths currently lacks high bandwidth and low-voltage modulators, which add electro-optic functionality to passive circuits. Here, integrated hybrid thin-film lithium niobate (TFLN) electro-optic Mach–Zehnder modulators (MZM) are shown, using TFLN bonded to planarized silicon nitride waveguides. The design does not require TFLN etching or patterning. The push–pull MZM achieves a half-wave voltage length product (V π L) of 0.8 V.… Show more

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Cited by 29 publications
(3 citation statements)
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“…First, modulation e ciency V π •L is proportional to λ. Advanced chip-scale modulators in the visible band have been demonstrated to achieve a smaller V π •L 37,38 . Second, compared with commercial bulk LN modulators, TFLN modulators with a smaller electrode gap can be obtained owing to the high con nement of the optical mode eld, effectively improving the modulation e ciency.…”
Section: Resultsmentioning
confidence: 99%
“…First, modulation e ciency V π •L is proportional to λ. Advanced chip-scale modulators in the visible band have been demonstrated to achieve a smaller V π •L 37,38 . Second, compared with commercial bulk LN modulators, TFLN modulators with a smaller electrode gap can be obtained owing to the high con nement of the optical mode eld, effectively improving the modulation e ciency.…”
Section: Resultsmentioning
confidence: 99%
“…1(b). Since the power handling capability is essential at the Tx, waveguides are assumed to be implemented in a high-quality silicon nitride layer (SiN), that can carry much more power than silicon [36], and modulators to be implemented as LNOI on SiN [7]. At the Rx, SiN waveguides can also be utilized for the initial splitter network before light is transferred to silicon-based waveguides [37] and to germanium waveguide photodetectors [38].…”
Section: Equalization Conceptmentioning
confidence: 99%
“…Thin film lithium niobate on insulator (LNOI) stands out, with devices featuring low optical losses, very high bandwidths in excess of 100 GHz, reduced drive voltages, and high optical power handling capability [6]. Progress has also been made in the heterogeneous integration of such modulators into the silicon photonics platform [7]. Some more recently explored material systems such as barium titanate (BTO) even offer the prospect of being integrated at the level of 200 mm wafers [8].…”
Section: Introductionmentioning
confidence: 99%