2012
DOI: 10.1590/s1516-14392012005000108
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Effect of impurities on the Raman scattering of 6H-SiC crystals

Abstract: Raman spectroscopy was applied to different-impurities-doped 6H-SiC crystals. It had been found that the first-order Raman spectra of N-, Al-and B-doped 6H-SiC were shifted to higher frequency when comparing with undoped samples. However, the first-order Raman spectra of V-doped sample was shifted to lower frequency, revealing that there existed low free carrier concentration, which might be induced by the deep energy level effect of V impurity. Meanwhile, the second-order Raman spectra are independent of poly… Show more

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Cited by 41 publications
(12 citation statements)
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“…For instance, Lin et al. () showed that the TO peak of N‐doped 6H‐SiC shifts to higher wavenumbers by more than 2 cm −1 compared to that of the undoped sample in their study, while Li et al. () found that by increasing the nitrogen gas pressure by more than three orders of magnitude during doping, the corresponding TO peak shifts to higher values only by 0.6 cm −1 .…”
Section: Discussionmentioning
confidence: 87%
See 1 more Smart Citation
“…For instance, Lin et al. () showed that the TO peak of N‐doped 6H‐SiC shifts to higher wavenumbers by more than 2 cm −1 compared to that of the undoped sample in their study, while Li et al. () found that by increasing the nitrogen gas pressure by more than three orders of magnitude during doping, the corresponding TO peak shifts to higher values only by 0.6 cm −1 .…”
Section: Discussionmentioning
confidence: 87%
“…On the other hand, minor element impurities could shift the Raman peak of SiC to higher values, but the corresponding effects are not quantified because the impurity concentrations in SiC were not determined in most of the published studies. For instance, Lin et al (2012) showed that the TO peak of N-doped 6H-SiC shifts to higher wavenumbers by more than 2 cm À1 compared to that of the undoped sample in their study, while Li et al (2010) found that by increasing the nitrogen gas pressure by more than three orders of magnitude during doping, the corresponding TO peak shifts to higher values only by 0.6 cm À1 . In comparison, as will be discussed later, our correlated NanoSIMS and Raman studies of presolar SiC grains show that the nitrogen impurity, at~1 wt% levels in presolar SiC, only significantly broadens the TO peak of 3C-SiC without affecting the peak position.…”
Section: Raman Peak Broadening In Presolar Sic Grainsmentioning
confidence: 92%
“…The corresponding Raman intensity maps are shown as insets. From Figure a, three Raman intensity peaks around 760, 791, and 970 cm −1 can be observed, which correspond to the E 2 FTO x(1/3), FTO x(2/3), and FLO x(0) phonon modes of SiC, respectively . The Raman intensity map clearly shows the morphology of the SiC particle embedded in the Al12Si matrix.…”
Section: Resultsmentioning
confidence: 90%
“…SiC is a desirable material for power devices due to its superior physical properties such as a wide bandgap, high thermal conductivity, and high critical electric field, etc. [ 1 , 2 , 3 , 4 , 5 , 6 , 7 ]. In order to realize the visible light operation of SiC photoelectric devices applied in high temperature and high power regions, Si films were grown on SiC for visible light absorption [ 8 , 9 ].…”
Section: Introductionmentioning
confidence: 99%