We have used Rietveld whole pattern refinement methods to extract quantitative structural information from powder X-ray diffraction analyses of CIGS gallium diselenide) photovoltaic materials. Samples produced by single-stage co-evaporation generated a single-phase CIGS XRD pattern that yielded Ga/In relative site occupancies that were in good agreement with X-ray fluorescence measurement contrast, samples extracted during a threesequence showed complex behavior: an initial (Ga,In) that evolved into two distinct CIGS phases. Other changes, such as the dependence of the lattice parameter of the contact layer with process conditions, were observed via whole pattern Rietveld refinement.Index Terms -X-ray diffraction, physical vapor deposition photovoltaic cells, microstructure.