2002
DOI: 10.1590/s0103-97332002000200033
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Local order structure of a-SiOxNy:H grown by PECVD

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Cited by 9 publications
(6 citation statements)
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“…The biggest changes in spectra occur in a 1000 to 1500 cm −1 range after heating at 373-473 K. They result from removal of organic solvents residue from the bulk (isopropyl alcohol, acetic acid, and the corresponding ester). Fainting of bands d-h is correlated with decomposition of Pt complex at approximately 400 K. At the same time, appearance of a new band at 921 cm −1 , related to formation of SiO 2 (c)[35], can be observed. The peaks in the regions d-1018 cm −1 , e-1087 cm −1 are the complex's band from the Si-O-Si stretching vibrations and they are observable only in case of higher initial Pt concentration systems.…”
mentioning
confidence: 74%
“…The biggest changes in spectra occur in a 1000 to 1500 cm −1 range after heating at 373-473 K. They result from removal of organic solvents residue from the bulk (isopropyl alcohol, acetic acid, and the corresponding ester). Fainting of bands d-h is correlated with decomposition of Pt complex at approximately 400 K. At the same time, appearance of a new band at 921 cm −1 , related to formation of SiO 2 (c)[35], can be observed. The peaks in the regions d-1018 cm −1 , e-1087 cm −1 are the complex's band from the Si-O-Si stretching vibrations and they are observable only in case of higher initial Pt concentration systems.…”
mentioning
confidence: 74%
“…ATR-FTIR can distinguish the different polyanions (CMC vs PSS), but it is still qualitative and somehow speculative, especially because the Si–O broad band (from the silicon substrate) omits important information about the polymers. To solve this problem, we use the XPS high-resolution spectra for carbon and nitrogen.…”
Section: Discussionmentioning
confidence: 99%
“…67 On the other hand, only the PSS/ CHI spectrum presents a peak at 670 cm −1 , assigned to the S− OH group, and a peak at 1525 cm −1 , attributed to the aromatic CC bending, exclusive to the PSS chemical structure. 66 ATR-FTIR can distinguish the different polyanions (CMC vs PSS), but it is still qualitative and somehow speculative, especially because the Si−O broad band 68 (from the silicon substrate) omits important information about the polymers. To solve this problem, we use the XPS high-resolution spectra for carbon and nitrogen.…”
Section: Discussionmentioning
confidence: 99%
“…correlate with Si-O rocking 31 or with the silicon substrate. 32 No evidence for SiNO peak (expected to be at 3375 cm À1 ) following activation and exposure to air was detected.…”
mentioning
confidence: 99%