The evolution of the electrical properties of Nb 2 O 5 and WO 3 films, at different formation potentials ͑E f ͒, in 0.1 M HClO 4 , were followed by electrochemical impedance spectroscopy ͑EIS͒. During the growth of the oxide films, EIS spectra were acquired every hour, maintaining the potentiostatic pulse during 20 h. The Nb 2 O 5 and WO 3 impedance spectra show variations vs potentiostatic aging. However, the Mott-Schottky analysis showed that the density of donors ͑N D ͒ does not depend on the potentiostatic aging but depends on the E f , while, the flatband potential ͑E FB ͒ is almost constant with the potentiostatic aging and E f , for both oxides. The relationship between the invariability of the semiconductor properties ͑N D and E FB ͒ with the potentiostatic aging and the variation of the impedance spectra, in the case of the W, can be explained by the formation of an external layer of WO 3 ·͑H 2 O͒ x , which must be very thin; the detachment of this layer causes a very small difference in the thickness, not modifying the semiconductor properties ͑N D and E FB ͒, but greatly changing the electric properties of the film, since WO 3 ·͑H 2 O͒ x is more resistive. A similar hydration process may occur in the Nb 2 O 5 films to a lesser extent.The valve metals ͑i.e., Al, Nb, W, Ti, Ta, Zr, among others͒ form a passive film when oxidized, which protects the inner metal from corrosion in aggressive media. The electronic properties of the passive film greatly determine the kinetics of charge transfer, at the oxide-film/solution ͑F/S͒ interface, and therefore are key factors in the knowledge of the corrosion processes. The characterization of the oxide passive films has increasingly been performed by electrochemical impedance spectroscopy ͑EIS͒. 1 In this technique, the capacitance of the metal/oxide-film/solution ͑M/F/S͒ junction, is measured as a function of frequency and/or electrode potential ͑Mott-Schottky analysis, M-S͒. The oxide passive film characterization with EIS requires that the system be at steady state; in order to reach this condition, the potential must be applied for a certain time, ͑sta-bilization time, t ss ͒. In the literature, the stabilization time varies from 1 h to 24 h, 2,3 for the same oxide film, under similar conditions. It is generally agreed that a system has reached steady-state conditions when the current density during the potentiostatic growth of the film is nearly constant ͑i ss ͒. At steady state, the electric properties of the passive oxides are expected to have an invariant global behavior ͑with the potentiostatic aging͒, of all the processes involved in the dynamic growing dissolution of the oxide films, including those occurring on the outer layer ͑F/S interface͒, where the reprecipitation of the aqueous metal oxide, as well as the hydration of the film, occur. These last processes could not be detected by direct current measurements ͑i.e., i vs t plots͒. In contrast, the EIS, being an ac technique, allows the detection of various processes with different relaxation times; t...