Titanium Oxynitriding by Plasma-Assisted Thermochemical Treatments Using a Competitive Atmosphere of H2-N2-O2

Abstract

The incorporation of oxygen and/or nitrogen into the titanium lattice has garnered significant attention due to the broad spectrum of intermediate properties that can be achieved between TiN and TiO 2 . This article delves into the investigation of surface modification of titanium through plasma-assisted thermochemical treatments employing H 2 -N 2 -O 2 mixtures. The flow rate of the reducing gas (H 2 ) remained constant at 24 sccm, while the flow rates of N 2 and O 2 were adjusted to yield a total flow rate of 60 sccm. Analysis using GIXRD, Raman spectroscopy, and XPS demonstrated that TiN exhibits stability exclusively in an oxygen-free atmosphere, while TiO 2 , in contrast, necessitates an oxygen flux equal to or exceeding 18 sccm for stability. Furthermore, it was found that the presence of nitrogen in the plasma atmosphere resulted in a greater expansion of the α-titanium lattice, although the solubility of interstitials decreased. These findings highlight the potential for a controlled approach to producing solid solutions or titanium oxynitrides.