2021
DOI: 10.1590/1980-5373-mr-2021-0039
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Effect of Plasma Oxidation Treatment on Production of a SiOx/SiOxCyHz Bilayer to Protect Carbon Steel Against Corrosion

Abstract: Because of its excellent properties, carbon steel is a material widely used in several sectors. However, it is easily corroded when exposed to the environment. Seeking to remedy this problem, the possibility of coating carbon steel with SiO x /SiO x C y H z films generated by deposition and oxidation in low-pressure plasmas was investigated. Specifically, the effects of excitation power of the oxidation plasma on layer thickness, chemical structure, elemental composition, and barrier properties of the obtained… Show more

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Cited by 4 publications
(8 citation statements)
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References 94 publications
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“…In this structure, as illustrated in Figure 10, the -Si-CH 2 -Sibond represents one of the cross-linking points of the long siloxane chains. [76,77] However, the identification of this group in the FTIR spectra is difficult due to the strong absorption in the same wavenumber related to siloxane. [78] Other F I G U R E 9 (a) Variation of the Si-O-Si peak position and (b) Si-(CH 3 ) 2 -to-Si-(CH 3 ) 3 band ratio recorded for a total process time of 4 min as a function of the energy parameter obtained for various plasma deposition times and continuous carrier gas flow rates (full squares).…”
Section: Discussionmentioning
confidence: 99%
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“…In this structure, as illustrated in Figure 10, the -Si-CH 2 -Sibond represents one of the cross-linking points of the long siloxane chains. [76,77] However, the identification of this group in the FTIR spectra is difficult due to the strong absorption in the same wavenumber related to siloxane. [78] Other F I G U R E 9 (a) Variation of the Si-O-Si peak position and (b) Si-(CH 3 ) 2 -to-Si-(CH 3 ) 3 band ratio recorded for a total process time of 4 min as a function of the energy parameter obtained for various plasma deposition times and continuous carrier gas flow rates (full squares).…”
Section: Discussionmentioning
confidence: 99%
“…[56] possibilities of cross-linking occur by means of the formation of Si-Si and Si-O-Si bonds. [76,77] In all cases, the connection implies the loss of hydrogen atoms and/or methyl groups and hydrogen recombination (Si-H).…”
Section: Discussionmentioning
confidence: 99%
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“…From literature it is known that the spectral shape of the reflection peak contains information on the stoichiometric composition of the material: Increasing oxygen content in SiOx (i.e., higher values of x) will shift the features towards higher frequencies. 10,11 Also a possible incorporation of carbon can cause spectral features 11 outside our scan range. An initial measurement on two samples that were produced via PE-CVD at varied oxygen flow rates did not show any significant spectral variations apart from the apparent drop in intensity (figure 4, lower panel).…”
Section: Spectroscopymentioning
confidence: 99%
“…Deposition of silica-like SiO x and organosilicon SiO x C y H z thin films by plasma-enhanced chemical vapor deposition (PECVD) has attracted a lot of attention due to its prominent role in numerous technological applications [1][2][3][4][5]. These films are extensively used as gas permeation barrier coatings in food packaging [6][7][8][9][10][11][12], protective layers in the steel industry [13][14][15][16], and hydrophobic/superhydrophobic surfaces in automotive, textiles, and energy sectors [2][3][4]. One of the most frequently used precursors for the deposition of organosilicon films is hexamethyldisiloxane (HMDSO).…”
Section: Introductionmentioning
confidence: 99%