Deposition of TiO2 Film on Duplex Stainless Steel Substrate Using the Cathodic Cage Plasma Technique

Abstract

This research used the "cathodic cage (CC)" technique for TiO 2 film deposition on duplex stainless steel substrate. This technique uses a multiple hollow cathode effect. Duplex stainless steel substrates were treated at temperatures of 300 o C, 350 o C and 400 o C, giving a temperature value ratio (T s /T m ) of 0.27 to 0.31 (Ts being the substrate temperature and Tm the melting temperature of the deposited material). Treatment times of 1, 2 and 4 hours were administered and polycrystalline TiO 2 films were obtained. The films were analyzed by optical microscopy (OM), X-ray diffraction (XRD), Raman spectroscopy and scanning electron microscopy (SEM). During analysis, the formation of uniform films and the possibility of controlling the TiO 2 phase were observed. It was also shown that with longer treatment times and higher temperatures the rutile phase predominates. For treatment times of 4 hours at all temperatures, the rutile structure was present. With treatment times of less than 4 hours, anatase was present. In addition, results showed that this simple, low cost technique can be an alternative method for depositions of TiO 2 films, with the advantage of high levels of control over porosity, thickness and phase composition (anatase and rutile).

Synthesis of TiN and TiO2 thin films by cathodic cage plasma deposition: a brief review

“…The coating deposition rate was around 2.5 μm/h at 150 Pa pressure and 400 °C temperature. Later on, in 2016, Sousa et al [75] reported the effective deposition of titanium dioxide film on duplex stainless steel assisted with titanium double-layer cathodic cage. This process was carried out at various processing temperatures (300, 350, and 400 °C) and various treatment time (1, 2, and 4 h) to attain polycrystalline titanium dioxide depending upon control parameters.…”

Investigation of FeN and TiN thin films properties for possible application in electronic devices

“…1 for resistivity reduces to the following form (Eq. 2): = 2 ( ) (2) In this work, for the samples with possible deposition of FeN and TiN, the resistivity asurements by the four-point probes method were obtained in two different positions, as (1) (2)…”

“…In recent years, with advances in electronics technology and the beginning of research on the field of nanotechnologies, plasma deposition using the cathodic cage technique (hollow-cathode effect) is one of the processes of surface coating that provides the improvement of certain mechanical and chemical properties of the surface of various materials, being responsible for innovative technological applications 1 . Through this technique of plasma deposition, a cathodically polarized screen surrounds the samples, being possible to obtain uniform and continuous layers, even in samples with complex geometries 2,3 .…”

Influence of Hastelloy’s Cathodic Cage Plasma Deposition on Corrosion Resistance of AISI 304 Stainless Steel and of AISI D6 Tool Steel

“…Among the processing techniques for coatings deposition we can highlight the cathodic cage plasma deposition, consisting in the combination of the following mechanisms: sputtering, which occurs in the cathodic cage and allows the deposition of several coatings depending on the material of the cage; physical adsorption, from the combination with plasma specimens, presenting as an advantage the possibility of using the technique for both oxide and nitride deposition; deposition; desorption and diffusion [11][12][13] . This technique is widely disseminated in the literature for samples and cathodic cages of various materials 11,[14][15][16][17][18][19] , however, there are no reports of the use of Hastelloy's cage, a nickel alloy characterized by high molybdenum and chromium contents, which together with nickel are responsible for their high pitting corrosion resistance 20 , thus, it is considered that the use of Hastelloy as a cathodic target can contribute to the synthesis of a coating with high corrosion resistance.…”