Influence of the pressure on the interaction between stearic acid and Ar-O2 in inductively coupled radio frequency plasma
Euclides Alexandre Bernardelli,
Fernanda Splett,
Carlos Eduardo Farias
et al.
Abstract:This work aimed to analyze the influence of treatment pressure on the interaction between stearic acid and an Argon-Oxygen plasma. The fixed variables were the applied RF plasma power (50 W), treatment time (30 min), and treatment starting temperature (273 K). The pressure was varied as follows: 0.2, 0.6, and 1.0 Torr. For all treatment conditions, the etching of the samples was observed, as evidenced by the mass loss of the specimens and by following the gaseous by-products of reactions employing a mass spect… Show more
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