2010
DOI: 10.1007/s11448-008-2010-8
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10.1007/s11448-008-2010-8

Abstract: The creation of regular nanostructures of a specific geometry and various compositions on the semiconductor surfaces is of great interest for basic research and is presently the main line in nanotechnology [1,2]. Note that the physical properties of the nanoobjects differ radically from those of their bulk analogs. There are two different technological processes applied in nanostructure formation. First, nanolithography is the most widely developing technique. However, it involves an internal limiting paramete… Show more

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