Abstract:The creation of regular nanostructures of a specific geometry and various compositions on the semiconductor surfaces is of great interest for basic research and is presently the main line in nanotechnology [1,2]. Note that the physical properties of the nanoobjects differ radically from those of their bulk analogs. There are two different technological processes applied in nanostructure formation. First, nanolithography is the most widely developing technique. However, it involves an internal limiting paramete… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.