1 PPM precision self-calibration of scale factor in MEMS Coriolis vibratory gyroscopes

Trusov, Alexander A.; Prikhodko, Igor P.; Rozelle, D. M.; Meyer, A. D.; Shkel, Andrei M.

doi:10.1109/transducers.2013.6627321

Cited by 37 publications

(15 citation statements)

References 3 publications

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“…The exceptions, however, are certain self-calibration techniques demonstrated in [3] and [4]. While highly designspecific to date, these efforts demonstrated MEMS gyroscope accuracy to just a few hundred parts per million from careful modeling of gyroscope response to perturbations and added stimulus within the gyroscope itself.…”

Section: Resultsmentioning

confidence: 99%

“…While highly designspecific to date, these efforts demonstrated MEMS gyroscope accuracy to just a few hundred parts per million from careful modeling of gyroscope response to perturbations and added stimulus within the gyroscope itself. Trusov et al [4] further achieved a 1 ppm accuracy over 10°C through use of feedback. The greatest opportunity of a microstage of the type presented here may be to generalize calibration to arbitrary, likely lower cost, microgyroscopes, though not to the degree possible for the most carefully modeled designs.…”

Section: Resultsmentioning

confidence: 99%

“…One approach to such calibration is to carefully model inertial measurement unit (IMU) sensitivity to factors, such as temperature, humidity, and other operational parameters, and use a model to predict gain and bias changes, possibly with additional use of higher order or nonlinear dynamic behavior. Gyroscope gain accuracies on the order of a few hundred parts per million have been demonstrated by self-calibration using temperature [3] or self-excited coriolis forcing [4]. These approaches require minimal change to gyroscope hardware, but any given model of such detail is limited to a specific sensor design.…”

Section: Introductionmentioning

confidence: 99%

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Estimation With Threshold Sensing for Gyroscope Calibration Using a Piezoelectric Microstage

Edamana

Chen

Slavin

et al. 2015

IEEE Trans. Contr. Syst. Technol.

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A sensing estimation scheme is presented that combines analog and threshold sensing on a piezoelectric microactuator for calibration of microscale inertial sensors. Using a variation of the Kalman filter, an asynchronous threshold sensor improves state estimates obtained from less reliable analog sensor measurements of microactuator motion. The resulting velocity estimates are compared with estimates without threshold sensing, and related to feasible calibration performance for gyroscopes. Results show that incorporating threshold sensors in a projected low-noise environment based on capacitive sensing will produce high-accuracy velocity measurements at certain fixed angles, with an approximately 80% reduction in angular velocity estimation error. Experimental testing with noisier, more variable piezoelectric sensing shows improved estimation accuracy at all velocities and positions when threshold detections are added. In simulation, the addition of feedback control is shown to further improve estimation accuracy.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Estimation With Threshold Sensing for Gyroscope Calibration Using a Piezoelectric Microstage

Edamana

Chen

Slavin

et al. 2015

IEEE Trans. Contr. Syst. Technol.

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“…The developed system architecture, performance projection models, and software are applicable to other mode symmetric CVGs, e.g. the high Q-factor silicon MEMS Quad Mass Gyro (QMG) [8]. Fig.…”

Section: Discussionmentioning

confidence: 99%

Continuously self-calibrating CVG system using hemispherical resonator gyroscopes

Trusov

Phillips

Mccammon

et al. 2015

2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings

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This paper reports development and validation over temperature of a drift free Coriolis Vibratory Gyroscope (CVG) system using two 30 mm diameter HRGs mechanized as inner electrode milli-HRG with IRAD CVG electronics. The system employs mode reversal for bias and pattern angle modulation for scale factor self-calibration. Mission software runs on a standard PC and performs sequencing of the selfcalibration and fusion of the individual gyro data into a single uninterrupted delta-theta stream. Extensive rate table testing of the system was conducted to characterize performance. Tests demonstrated a 2-3 orders of magnitude improvement of stability over individual gyros in a 30 C temperature range, and a stability of 100 micro-deg/hr without temperature control at a week time scale. These results provide a new level of validation for selfcalibrated CVG system approach and its revolutionary potential to overcome the CVG accuracy limitations and enable high performance free inertial applications with unprecedentedly low SWaP and factory calibration cost. Although the work is still ongoing, we have not yet discovered the limits of self-calibration.

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“…To enable a truly compact MEMS gyrocompass, the development of MEMS gimbals [16], [30] or rotary stages [31], [32] is, thus, critical. Alternative approaches eliminating a need for physical rotation of a gyroscope include bias/scale-factor self-calibration [33], [34], and virtual carouseling (without a rate table) [8].…”

Section: Discussionmentioning

confidence: 99%

What is MEMS Gyrocompassing? Comparative Analysis of Maytagging and Carouseling

Prikhodko

Zotov

Trusov

et al. 2013

J. Microelectromech. Syst.

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North-finding based on micromachined gyroscopes is an attractive possibility. This paper analyzes north-finding methods and demonstrates a measured 4 mrad standard deviation azimuth uncertainty using an in-house developed vibratory silicon MEMS quadruple mass gyroscope (QMG). We instrumented a vacuum packaged QMG with isotropic Q-factor of 1.2 million and Allan deviation bias instability of 0.2°/hr for azimuth detection by measuring the earth's rotation. Continuous rotation ("carouseling") produced azimuth datapoints with uncertainty diminishing as the square root of the number of turns. Integration of 100 datapoints with normally distributed errors reduced uncertainty to 4 mrad, beyond the noise of current QMG instrumentation. We also implemented self-calibration methods, including in-situ temperature sensing and discrete ± 180°turning ("maytagging" or two-point gyrocompassing) as potential alternatives to carouseling. While both mechanizations produced similar azimuth uncertainty, we conclude that carouseling is more advantageous as it is robust to bias, scale-factor, and temperature drifts, although it requires a rotary platform providing continuous rotation. Maytagging, on the other hand, can be implemented using a simple turn table, but requires calibration due to temperature-induced drifts.[2012-0378]

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1 PPM precision self-calibration of scale factor in MEMS Coriolis vibratory gyroscopes

Cited by 37 publications

References 3 publications

Estimation With Threshold Sensing for Gyroscope Calibration Using a Piezoelectric Microstage

Estimation With Threshold Sensing for Gyroscope Calibration Using a Piezoelectric Microstage

Continuously self-calibrating CVG system using hemispherical resonator gyroscopes

What is MEMS Gyrocompassing? Comparative Analysis of Maytagging and Carouseling

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